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- W2105118966 abstract "Accurate extraction of parasitics is an important pre-cursor to timing and signal integrity analysis. In deep sub-micron technologies, the interconnect cross-section areas of metal at various points in a layer are no longer the same -the metal can be etched differently with varying width and spacings and/or the top-surface of the interconnect layer may be non-planar due to chemical mechanical polishing (CMP). Moreover, the cross-sections are also becoming increasingly trapezoidal in nature. In such a scenario, computing resistances using counting squares technique and other two-dimensional methods may no longer be accurate. At the same time, using highly accurate techniques such as a fine-grained finite element method (FEM) may not be feasible due to the large computation time. In this work, a three-dimensional FEM based resistance extractor that is fast and accurate has been implemented and compared with two other extractors, a counting squares based extractor and a meshing based extractor. The key behind this is an efficient domain discretization which is a conformal decomposition of the original geometry" @default.
- W2105118966 created "2016-06-24" @default.
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- W2105118966 date "2007-01-01" @default.
- W2105118966 modified "2023-09-25" @default.
- W2105118966 title "A 3-dimensional FEM Based Resistance Extraction" @default.
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- W2105118966 doi "https://doi.org/10.1109/vlsid.2007.8" @default.
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