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- W2105165767 abstract "In order to gain insight into the mechanisms of polyvinyl acetal (PVA) roll brush cleaning in semiconductor device fabrication, we measure the coefficient of friction (COF) between the PVA brush and a substrate. In particular, we focus on the brush rotation speed and the surface wettability. The COF is found to decrease and approach 0.5 as the brush rotation speed increases. For the case of low rotation speeds, the COF of hydrophobic surfaces has a large value, almost 1.0, while that of hydrophilic surfaces is small. These results imply that the brush and the surface directly contact and the real contact area of the PVA brush increases over the duration of the contact time." @default.
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- W2105165767 date "2013-08-31" @default.
- W2105165767 modified "2023-09-25" @default.
- W2105165767 title "Effect of Surface Wettability on Frictional Conditions of PVA Roll Brushes" @default.
- W2105165767 doi "https://doi.org/10.1149/05806.0063ecst" @default.
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