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• W2105173834 abstract "This paper describes a piezoelectric micropump built on a dome-shaped diaphragm with one-way parylene valves. The micropump uses piezoelectric ZnO film (less than 10 /spl mu/m thick) to actuate a parylene dome diaphragm, which is fabricated with an innovative, IC-compatible process on a silicon substrate. Piezoelectric ZnO film is sputter-deposited on a parylene dome diaphragm with its C-axis oriented perpendicular to the dome surface. Two one-way check valves (made of parylene) are integrated with a piezoelectrically actuated dome diaphragm to form a multi-chip micropump. The fabricated micropump (10/spl times/10/spl times/1.6 mm/sup 3/) consumes extremely low power (i.e., 3 mW to pump 3.2 /spl mu/L/min) and shows negligible leak up to 700 Pa static differential pressure." @default.
• W2105173834 created "2016-06-24" @default.
• W2105173834 creator A5046110835 @default.
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• W2105173834 date "2005-04-01" @default.
• W2105173834 modified "2023-09-23" @default.
• W2105173834 title "Piezoelectrically actuated dome-shaped diaphragm micropump" @default.
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• W2105173834 doi "https://doi.org/10.1109/jmems.2004.839331" @default.
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