FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2105222013> ?p ?o ?g. }

• W2105222013 endingPage "C85" @default.
• W2105222013 startingPage "C85" @default.
• W2105222013 abstract "We have synthesized and investigated a novel precursor, , (1), for chemical vapor deposition (CVD) of Cu thin films using as a reducing agent. The alkyl compound (1) is thermally stable but sublimable when heated in a vacuum. Cu was selectively deposited on Si(100) substrate with Pd as a seed layer. X-ray photoelectron spectroscopy showed that a pure Cu film was deposited on the Pd seed layer at , and the film is clean in terms of possible contaminants. Thus the Cu(I) alkyl compound is suitable for CVD." @default.
• W2105222013 created "2016-06-24" @default.
• W2105222013 creator A5002744799 @default.
• W2105222013 creator A5010108727 @default.
• W2105222013 creator A5020867211 @default.
• W2105222013 creator A5051737534 @default.
• W2105222013 creator A5057893866 @default.
• W2105222013 creator A5072602254 @default.
• W2105222013 creator A5079139665 @default.
• W2105222013 date "2005-01-01" @default.
• W2105222013 modified "2023-09-23" @default.
• W2105222013 title "Evaluation of a Novel Cu(I) Precursor for Chemical Vapor Deposition" @default.
• W2105222013 cites W1950898098 @default.
• W2105222013 cites W1966702502 @default.
• W2105222013 cites W1977075696 @default.
• W2105222013 cites W1985028930 @default.
• W2105222013 cites W1991303807 @default.
• W2105222013 cites W1993680137 @default.
• W2105222013 cites W1994275876 @default.
• W2105222013 cites W2004608515 @default.
• W2105222013 cites W2007210363 @default.
• W2105222013 cites W2009099717 @default.
• W2105222013 cites W2017277510 @default.
• W2105222013 cites W2024984780 @default.
• W2105222013 cites W2029176235 @default.
• W2105222013 cites W2030175246 @default.
• W2105222013 cites W2037555390 @default.
• W2105222013 cites W2041160506 @default.
• W2105222013 cites W2048723817 @default.
• W2105222013 cites W2063038089 @default.
• W2105222013 cites W2065760521 @default.
• W2105222013 cites W2066511210 @default.
• W2105222013 cites W2070224591 @default.
• W2105222013 cites W2072059219 @default.
• W2105222013 cites W2074921157 @default.
• W2105222013 cites W2076650823 @default.
• W2105222013 cites W2077461818 @default.
• W2105222013 cites W2084015759 @default.
• W2105222013 cites W2084105874 @default.
• W2105222013 cites W2091094301 @default.
• W2105222013 cites W2091633122 @default.
• W2105222013 cites W2093194503 @default.
• W2105222013 cites W2100415858 @default.
• W2105222013 cites W2113037198 @default.
• W2105222013 cites W2127176946 @default.
• W2105222013 doi "https://doi.org/10.1149/1.1922868" @default.
• W2105222013 hasPublicationYear "2005" @default.
• W2105222013 type Work @default.
• W2105222013 sameAs 2105222013 @default.
• W2105222013 citedByCount "3" @default.
• W2105222013 countsByYear W21052220132013 @default.
• W2105222013 crossrefType "journal-article" @default.
• W2105222013 hasAuthorship W2105222013A5002744799 @default.
• W2105222013 hasAuthorship W2105222013A5010108727 @default.
• W2105222013 hasAuthorship W2105222013A5020867211 @default.
• W2105222013 hasAuthorship W2105222013A5051737534 @default.
• W2105222013 hasAuthorship W2105222013A5057893866 @default.
• W2105222013 hasAuthorship W2105222013A5072602254 @default.
• W2105222013 hasAuthorship W2105222013A5079139665 @default.
• W2105222013 hasConcept C111368507 @default.
• W2105222013 hasConcept C111548154 @default.
• W2105222013 hasConcept C127313418 @default.
• W2105222013 hasConcept C127413603 @default.
• W2105222013 hasConcept C151730666 @default.
• W2105222013 hasConcept C171250308 @default.
• W2105222013 hasConcept C175708663 @default.
• W2105222013 hasConcept C178790620 @default.
• W2105222013 hasConcept C183866003 @default.
• W2105222013 hasConcept C185592680 @default.
• W2105222013 hasConcept C19067145 @default.
• W2105222013 hasConcept C192562407 @default.
• W2105222013 hasConcept C2777289219 @default.
• W2105222013 hasConcept C2779227376 @default.
• W2105222013 hasConcept C2780263894 @default.
• W2105222013 hasConcept C2816523 @default.
• W2105222013 hasConcept C42360764 @default.
• W2105222013 hasConcept C57410435 @default.
• W2105222013 hasConcept C64297162 @default.
• W2105222013 hasConcept C75937256 @default.
• W2105222013 hasConcept C86803240 @default.
• W2105222013 hasConceptScore W2105222013C111368507 @default.
• W2105222013 hasConceptScore W2105222013C111548154 @default.
• W2105222013 hasConceptScore W2105222013C127313418 @default.
• W2105222013 hasConceptScore W2105222013C127413603 @default.
• W2105222013 hasConceptScore W2105222013C151730666 @default.
• W2105222013 hasConceptScore W2105222013C171250308 @default.
• W2105222013 hasConceptScore W2105222013C175708663 @default.
• W2105222013 hasConceptScore W2105222013C178790620 @default.
• W2105222013 hasConceptScore W2105222013C183866003 @default.
• W2105222013 hasConceptScore W2105222013C185592680 @default.
• W2105222013 hasConceptScore W2105222013C19067145 @default.
• W2105222013 hasConceptScore W2105222013C192562407 @default.
• W2105222013 hasConceptScore W2105222013C2777289219 @default.
• W2105222013 hasConceptScore W2105222013C2779227376 @default.
• W2105222013 hasConceptScore W2105222013C2780263894 @default.
• W2105222013 hasConceptScore W2105222013C2816523 @default.
• W2105222013 hasConceptScore W2105222013C42360764 @default.
• W2105222013 hasConceptScore W2105222013C57410435 @default.

• next