Matches in SemOpenAlex for { <https://semopenalex.org/work/W2105394554> ?p ?o ?g. }
Showing items 1 to 95 of
95
with 100 items per page.
- W2105394554 endingPage "1773" @default.
- W2105394554 startingPage "1767" @default.
- W2105394554 abstract "The active structural component of a capacitive micromachined ultrasonic transducer (CMUT) is the top plate which vibrates under the influence of a time-varying electrostatic force thereby producing ultrasound waves of the desired frequency in the surrounding medium. Analysis of MEMS devices which rely on electrostatic actuation is complicated due to the fact that the structural deformations alter the electrostatic forces, which redistribute and modify the applied loads. Hence, it becomes imperative to consider the electrostatics-structure coupling aspect in the design of these devices. This paper presents an approximate analytical solution for the static deflection of a thin, clamped circular plate caused by electrostatic forces which are inherently nonlinear. Traditionally, finite element simulations using some commercial software such as ANSYS are employed to determine the structural deflections caused by electrostatic forces. Since the structural deformation alters the electrostatic field, a coupled-field simulation is required wherein the electrostatic mesh is continuously updated to coincide with the deflection of the structure. Such simulations are extremely time consuming, in addition to being nontransparent and somewhat hard to implement. We employ the classical thin-plate theory which is adequate when the ratio of the diameter to thickness of the plate is very large, a situation commonly prevalent in many MEMS devices, especially the CMUTs. We solve the thin-plate electrostatic-elastic equation using the Galerkin-weighted residual technique, under the assumption that the deflections are small in comparison to the thickness of the plate. The evaluation of the electrostatic force between the two plates is simplified due to the fact that the electrostatic gap is much smaller than the lateral dimensions of the device. The results obtained are compared to those found from ANSYS simulations and an excellent agreement is observed between the two. The pull-in voltage predicted by our model is close to the value predicted by ANSYS simulations." @default.
- W2105394554 created "2016-06-24" @default.
- W2105394554 creator A5005531280 @default.
- W2105394554 creator A5050184490 @default.
- W2105394554 date "2010-11-01" @default.
- W2105394554 modified "2023-10-17" @default.
- W2105394554 title "Elasto-Electrostatic Analysis of Circular Microplates Used in Capacitive Micromachined Ultrasonic Transducers" @default.
- W2105394554 cites W2017735516 @default.
- W2105394554 cites W2087059327 @default.
- W2105394554 cites W2105394554 @default.
- W2105394554 cites W2117623308 @default.
- W2105394554 cites W2121414486 @default.
- W2105394554 cites W2159442239 @default.
- W2105394554 cites W2621919695 @default.
- W2105394554 cites W4233385840 @default.
- W2105394554 doi "https://doi.org/10.1109/jsen.2010.2049017" @default.
- W2105394554 hasPublicationYear "2010" @default.
- W2105394554 type Work @default.
- W2105394554 sameAs 2105394554 @default.
- W2105394554 citedByCount "41" @default.
- W2105394554 countsByYear W21053945542012 @default.
- W2105394554 countsByYear W21053945542013 @default.
- W2105394554 countsByYear W21053945542014 @default.
- W2105394554 countsByYear W21053945542015 @default.
- W2105394554 countsByYear W21053945542016 @default.
- W2105394554 countsByYear W21053945542017 @default.
- W2105394554 countsByYear W21053945542018 @default.
- W2105394554 countsByYear W21053945542019 @default.
- W2105394554 countsByYear W21053945542020 @default.
- W2105394554 countsByYear W21053945542021 @default.
- W2105394554 countsByYear W21053945542023 @default.
- W2105394554 crossrefType "journal-article" @default.
- W2105394554 hasAuthorship W2105394554A5005531280 @default.
- W2105394554 hasAuthorship W2105394554A5050184490 @default.
- W2105394554 hasConcept C117626034 @default.
- W2105394554 hasConcept C119599485 @default.
- W2105394554 hasConcept C121332964 @default.
- W2105394554 hasConcept C127413603 @default.
- W2105394554 hasConcept C135628077 @default.
- W2105394554 hasConcept C16826683 @default.
- W2105394554 hasConcept C192562407 @default.
- W2105394554 hasConcept C206755178 @default.
- W2105394554 hasConcept C24890656 @default.
- W2105394554 hasConcept C2781355719 @default.
- W2105394554 hasConcept C37977207 @default.
- W2105394554 hasConcept C49040817 @default.
- W2105394554 hasConcept C56318395 @default.
- W2105394554 hasConcept C57879066 @default.
- W2105394554 hasConcept C58772458 @default.
- W2105394554 hasConcept C60799052 @default.
- W2105394554 hasConcept C62520636 @default.
- W2105394554 hasConcept C66938386 @default.
- W2105394554 hasConcept C74650414 @default.
- W2105394554 hasConcept C81288441 @default.
- W2105394554 hasConceptScore W2105394554C117626034 @default.
- W2105394554 hasConceptScore W2105394554C119599485 @default.
- W2105394554 hasConceptScore W2105394554C121332964 @default.
- W2105394554 hasConceptScore W2105394554C127413603 @default.
- W2105394554 hasConceptScore W2105394554C135628077 @default.
- W2105394554 hasConceptScore W2105394554C16826683 @default.
- W2105394554 hasConceptScore W2105394554C192562407 @default.
- W2105394554 hasConceptScore W2105394554C206755178 @default.
- W2105394554 hasConceptScore W2105394554C24890656 @default.
- W2105394554 hasConceptScore W2105394554C2781355719 @default.
- W2105394554 hasConceptScore W2105394554C37977207 @default.
- W2105394554 hasConceptScore W2105394554C49040817 @default.
- W2105394554 hasConceptScore W2105394554C56318395 @default.
- W2105394554 hasConceptScore W2105394554C57879066 @default.
- W2105394554 hasConceptScore W2105394554C58772458 @default.
- W2105394554 hasConceptScore W2105394554C60799052 @default.
- W2105394554 hasConceptScore W2105394554C62520636 @default.
- W2105394554 hasConceptScore W2105394554C66938386 @default.
- W2105394554 hasConceptScore W2105394554C74650414 @default.
- W2105394554 hasConceptScore W2105394554C81288441 @default.
- W2105394554 hasIssue "11" @default.
- W2105394554 hasLocation W21053945541 @default.
- W2105394554 hasOpenAccess W2105394554 @default.
- W2105394554 hasPrimaryLocation W21053945541 @default.
- W2105394554 hasRelatedWork W145693046 @default.
- W2105394554 hasRelatedWork W1566272123 @default.
- W2105394554 hasRelatedWork W1982478534 @default.
- W2105394554 hasRelatedWork W2023486518 @default.
- W2105394554 hasRelatedWork W2036624280 @default.
- W2105394554 hasRelatedWork W2101224246 @default.
- W2105394554 hasRelatedWork W2785383956 @default.
- W2105394554 hasRelatedWork W4241749518 @default.
- W2105394554 hasRelatedWork W626680824 @default.
- W2105394554 hasRelatedWork W2183790653 @default.
- W2105394554 hasVolume "10" @default.
- W2105394554 isParatext "false" @default.
- W2105394554 isRetracted "false" @default.
- W2105394554 magId "2105394554" @default.
- W2105394554 workType "article" @default.