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- W2105729100 abstract "We have attempted to reduce the plasma-induced damage to the thin gate oxides during intermetal dielectric (IMD) gap-fill process by high-density plasma (HDP) chemical vapor deposition (CVD). It was revealed that the optimization of preheating step could reduce the damage. The H/sub 2/-based HDP CVD process was also effective in reducing plasma-induced damage compared with the conventional He-based process. The gate oxide failure was reduced remarkably at the low deposition temperatures less than 400/spl deg/C. Both the significant damage reduction and the excellent gap-fill performance were achieved by the adoption of the phosphorus silicate glass (PSG) using the low temperature H/sub 2/-based HDP CVD technique." @default.
- W2105729100 created "2016-06-24" @default.
- W2105729100 creator A5001841766 @default.
- W2105729100 creator A5008674155 @default.
- W2105729100 creator A5013887356 @default.
- W2105729100 creator A5029932161 @default.
- W2105729100 creator A5040569943 @default.
- W2105729100 creator A5046688257 @default.
- W2105729100 creator A5051729945 @default.
- W2105729100 creator A5073116183 @default.
- W2105729100 creator A5081061447 @default.
- W2105729100 date "2005-01-01" @default.
- W2105729100 modified "2023-09-25" @default.
- W2105729100 title "Reduction of plasma-induced damage during intermetal dielectric deposition in high-density plasma" @default.
- W2105729100 cites W1955982247 @default.
- W2105729100 cites W1994350858 @default.
- W2105729100 cites W2039861568 @default.
- W2105729100 cites W2117852163 @default.
- W2105729100 cites W2134295556 @default.
- W2105729100 doi "https://doi.org/10.1109/icicdt.2005.1502601" @default.
- W2105729100 hasPublicationYear "2005" @default.
- W2105729100 type Work @default.
- W2105729100 sameAs 2105729100 @default.
- W2105729100 citedByCount "1" @default.
- W2105729100 countsByYear W21057291002015 @default.
- W2105729100 crossrefType "proceedings-article" @default.
- W2105729100 hasAuthorship W2105729100A5001841766 @default.
- W2105729100 hasAuthorship W2105729100A5008674155 @default.
- W2105729100 hasAuthorship W2105729100A5013887356 @default.
- W2105729100 hasAuthorship W2105729100A5029932161 @default.
- W2105729100 hasAuthorship W2105729100A5040569943 @default.
- W2105729100 hasAuthorship W2105729100A5046688257 @default.
- W2105729100 hasAuthorship W2105729100A5051729945 @default.
- W2105729100 hasAuthorship W2105729100A5073116183 @default.
- W2105729100 hasAuthorship W2105729100A5081061447 @default.
- W2105729100 hasConcept C121332964 @default.
- W2105729100 hasConcept C133386390 @default.
- W2105729100 hasConcept C151730666 @default.
- W2105729100 hasConcept C159985019 @default.
- W2105729100 hasConcept C191897082 @default.
- W2105729100 hasConcept C192562407 @default.
- W2105729100 hasConcept C2779227376 @default.
- W2105729100 hasConcept C2779851234 @default.
- W2105729100 hasConcept C2816523 @default.
- W2105729100 hasConcept C38347018 @default.
- W2105729100 hasConcept C49040817 @default.
- W2105729100 hasConcept C57410435 @default.
- W2105729100 hasConcept C62520636 @default.
- W2105729100 hasConcept C64297162 @default.
- W2105729100 hasConcept C69544855 @default.
- W2105729100 hasConcept C82706917 @default.
- W2105729100 hasConcept C86803240 @default.
- W2105729100 hasConceptScore W2105729100C121332964 @default.
- W2105729100 hasConceptScore W2105729100C133386390 @default.
- W2105729100 hasConceptScore W2105729100C151730666 @default.
- W2105729100 hasConceptScore W2105729100C159985019 @default.
- W2105729100 hasConceptScore W2105729100C191897082 @default.
- W2105729100 hasConceptScore W2105729100C192562407 @default.
- W2105729100 hasConceptScore W2105729100C2779227376 @default.
- W2105729100 hasConceptScore W2105729100C2779851234 @default.
- W2105729100 hasConceptScore W2105729100C2816523 @default.
- W2105729100 hasConceptScore W2105729100C38347018 @default.
- W2105729100 hasConceptScore W2105729100C49040817 @default.
- W2105729100 hasConceptScore W2105729100C57410435 @default.
- W2105729100 hasConceptScore W2105729100C62520636 @default.
- W2105729100 hasConceptScore W2105729100C64297162 @default.
- W2105729100 hasConceptScore W2105729100C69544855 @default.
- W2105729100 hasConceptScore W2105729100C82706917 @default.
- W2105729100 hasConceptScore W2105729100C86803240 @default.
- W2105729100 hasLocation W21057291001 @default.
- W2105729100 hasOpenAccess W2105729100 @default.
- W2105729100 hasPrimaryLocation W21057291001 @default.
- W2105729100 hasRelatedWork W1991730544 @default.
- W2105729100 hasRelatedWork W2010390859 @default.
- W2105729100 hasRelatedWork W2043673973 @default.
- W2105729100 hasRelatedWork W2044511571 @default.
- W2105729100 hasRelatedWork W2085068016 @default.
- W2105729100 hasRelatedWork W2355621656 @default.
- W2105729100 hasRelatedWork W2374646600 @default.
- W2105729100 hasRelatedWork W2410867535 @default.
- W2105729100 hasRelatedWork W2863738027 @default.
- W2105729100 hasRelatedWork W4253731651 @default.
- W2105729100 isParatext "false" @default.
- W2105729100 isRetracted "false" @default.
- W2105729100 magId "2105729100" @default.
- W2105729100 workType "article" @default.