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• W2105773069 abstract "The catalytic decomposition of RuO₂ with the help of Ru in the film played the crucial role for the increase in the active oxygen, which results that the growth per cycle of TiO₂ at the initial growth stage was drastically increased on RuO<italic>x</italic> (RuO₂/Ru mixture) compared to Ru and RuO₂." @default.
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• W2105773069 date "2014-01-01" @default.
• W2105773069 modified "2023-09-25" @default.
• W2105773069 title "Chemistry of active oxygen in RuO_x and its influence on the atomic layer deposition of TiO₂ films" @default.
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• W2105773069 doi "https://doi.org/10.1039/c4tc01381f" @default.
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