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• W2105898907 endingPage "2123" @default.
• W2105898907 startingPage "2114" @default.
• W2105898907 abstract "Transient enhanced diffusion (TED) of boron limits the formation of ultrashallow junctions needed in next-generation microelectronic devices. A comprehensive TED model needs many parameters governing the physical and chemical processes. Prior estimates of the most likely values for the parameters as well as their accuracies are determined from maximum likelihood estimation applied to estimates from focused individual experiments and density functional theory calculations. Here a systematic approach to model-parameter identification using maximum a posteriori estimation is employed combining the maximum likelihood parameter estimates and their uncertainties in conjunction with after-anneal boron SIMS profiles to obtain accurate TED energetics. Guidance on future experimental and ab initio efforts are given based on the agreement (and disagreement) between the prior and posterior distributions." @default.
• W2105898907 created "2016-06-24" @default.
• W2105898907 creator A5005131667 @default.
• W2105898907 creator A5030033867 @default.
• W2105898907 creator A5054672110 @default.
• W2105898907 creator A5083684552 @default.
• W2105898907 date "2003-08-01" @default.
• W2105898907 modified "2023-09-24" @default.
• W2105898907 title "MaximumA posteriori estimation of transient enhanced diffusion energetics" @default.
• W2105898907 cites W1482962472 @default.
• W2105898907 cites W1965637621 @default.
• W2105898907 cites W1970409488 @default.
• W2105898907 cites W1981212347 @default.
• W2105898907 cites W1981545888 @default.
• W2105898907 cites W1981790438 @default.
• W2105898907 cites W1994392377 @default.
• W2105898907 cites W2005958227 @default.
• W2105898907 cites W2013050196 @default.
• W2105898907 cites W2019641627 @default.
• W2105898907 cites W2024010084 @default.
• W2105898907 cites W2029811191 @default.
• W2105898907 cites W2038819033 @default.
• W2105898907 cites W2044101375 @default.
• W2105898907 cites W2048040772 @default.
• W2105898907 cites W2063602026 @default.
• W2105898907 cites W2113285032 @default.
• W2105898907 cites W2122990916 @default.
• W2105898907 cites W2123139184 @default.
• W2105898907 cites W2138814370 @default.
• W2105898907 cites W2568151884 @default.
• W2105898907 doi "https://doi.org/10.1002/aic.690490819" @default.
• W2105898907 hasPublicationYear "2003" @default.
• W2105898907 type Work @default.
• W2105898907 sameAs 2105898907 @default.
• W2105898907 citedByCount "36" @default.
• W2105898907 countsByYear W21058989072012 @default.
• W2105898907 countsByYear W21058989072013 @default.
• W2105898907 countsByYear W21058989072014 @default.
• W2105898907 countsByYear W21058989072015 @default.
• W2105898907 countsByYear W21058989072017 @default.
• W2105898907 countsByYear W21058989072021 @default.
• W2105898907 crossrefType "journal-article" @default.
• W2105898907 hasAuthorship W2105898907A5005131667 @default.
• W2105898907 hasAuthorship W2105898907A5030033867 @default.
• W2105898907 hasAuthorship W2105898907A5054672110 @default.
• W2105898907 hasAuthorship W2105898907A5083684552 @default.
• W2105898907 hasConcept C105795698 @default.
• W2105898907 hasConcept C111472728 @default.
• W2105898907 hasConcept C111919701 @default.
• W2105898907 hasConcept C11413529 @default.
• W2105898907 hasConcept C121332964 @default.
• W2105898907 hasConcept C121864883 @default.
• W2105898907 hasConcept C138885662 @default.
• W2105898907 hasConcept C167928553 @default.
• W2105898907 hasConcept C171250308 @default.
• W2105898907 hasConcept C185544564 @default.
• W2105898907 hasConcept C187937830 @default.
• W2105898907 hasConcept C192562407 @default.
• W2105898907 hasConcept C2780799671 @default.
• W2105898907 hasConcept C33923547 @default.
• W2105898907 hasConcept C41008148 @default.
• W2105898907 hasConcept C49781872 @default.
• W2105898907 hasConcept C501308230 @default.
• W2105898907 hasConcept C69357855 @default.
• W2105898907 hasConcept C75553542 @default.
• W2105898907 hasConcept C97355855 @default.
• W2105898907 hasConcept C97514900 @default.
• W2105898907 hasConcept C9810830 @default.
• W2105898907 hasConceptScore W2105898907C105795698 @default.
• W2105898907 hasConceptScore W2105898907C111472728 @default.
• W2105898907 hasConceptScore W2105898907C111919701 @default.
• W2105898907 hasConceptScore W2105898907C11413529 @default.
• W2105898907 hasConceptScore W2105898907C121332964 @default.
• W2105898907 hasConceptScore W2105898907C121864883 @default.
• W2105898907 hasConceptScore W2105898907C138885662 @default.
• W2105898907 hasConceptScore W2105898907C167928553 @default.
• W2105898907 hasConceptScore W2105898907C171250308 @default.
• W2105898907 hasConceptScore W2105898907C185544564 @default.
• W2105898907 hasConceptScore W2105898907C187937830 @default.
• W2105898907 hasConceptScore W2105898907C192562407 @default.
• W2105898907 hasConceptScore W2105898907C2780799671 @default.
• W2105898907 hasConceptScore W2105898907C33923547 @default.
• W2105898907 hasConceptScore W2105898907C41008148 @default.
• W2105898907 hasConceptScore W2105898907C49781872 @default.
• W2105898907 hasConceptScore W2105898907C501308230 @default.
• W2105898907 hasConceptScore W2105898907C69357855 @default.
• W2105898907 hasConceptScore W2105898907C75553542 @default.
• W2105898907 hasConceptScore W2105898907C97355855 @default.
• W2105898907 hasConceptScore W2105898907C97514900 @default.
• W2105898907 hasConceptScore W2105898907C9810830 @default.
• W2105898907 hasIssue "8" @default.
• W2105898907 hasLocation W21058989071 @default.
• W2105898907 hasOpenAccess W2105898907 @default.
• W2105898907 hasPrimaryLocation W21058989071 @default.
• W2105898907 hasRelatedWork W1503532423 @default.
• W2105898907 hasRelatedWork W1637371294 @default.
• W2105898907 hasRelatedWork W1967494390 @default.
• W2105898907 hasRelatedWork W1997456797 @default.

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