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Matches in SemOpenAlex for { <https://semopenalex.org/work/W2105958096> ?p ?o ?g. }

• W2105958096 endingPage "955" @default.
• W2105958096 startingPage "951" @default.
• W2105958096 abstract "This article reports on a new method to obtain nitrided silica layers. Nitridation is caused by the incorporation of nitrogen atoms into the insulator from a nitrogen doped polysilicon overlayer. Details about the process and improvements of the main electrical characteristics of a metal-oxide-silicon structure are given." @default.
• W2105958096 created "2016-06-24" @default.
• W2105958096 creator A5006302232 @default.
• W2105958096 creator A5010410338 @default.
• W2105958096 creator A5014113718 @default.
• W2105958096 creator A5027801458 @default.
• W2105958096 creator A5049951870 @default.
• W2105958096 creator A5053013839 @default.
• W2105958096 date "1997-07-01" @default.
• W2105958096 modified "2023-10-04" @default.
• W2105958096 title "Electrical characteristics of thin silica layers nitrided by LPCVD nitrogen doped silicon" @default.
• W2105958096 cites W1967534481 @default.
• W2105958096 cites W1981094410 @default.
• W2105958096 cites W1982658746 @default.
• W2105958096 cites W1986207778 @default.
• W2105958096 cites W1995149623 @default.
• W2105958096 cites W2002150073 @default.
• W2105958096 cites W2009051381 @default.
• W2105958096 cites W2029146233 @default.
• W2105958096 cites W2051129356 @default.
• W2105958096 cites W2055043216 @default.
• W2105958096 cites W2061459429 @default.
• W2105958096 cites W2062569885 @default.
• W2105958096 cites W2069705357 @default.
• W2105958096 cites W2081547448 @default.
• W2105958096 cites W2091319188 @default.
• W2105958096 cites W2091654480 @default.
• W2105958096 cites W2125839334 @default.
• W2105958096 cites W2128294467 @default.
• W2105958096 cites W2148341276 @default.
• W2105958096 cites W2153949062 @default.
• W2105958096 cites W2158787331 @default.
• W2105958096 cites W2163894605 @default.
• W2105958096 cites W2164599632 @default.
• W2105958096 doi "https://doi.org/10.1016/s0038-1101(97)00005-1" @default.
• W2105958096 hasPublicationYear "1997" @default.
• W2105958096 type Work @default.
• W2105958096 sameAs 2105958096 @default.
• W2105958096 citedByCount "7" @default.
• W2105958096 crossrefType "journal-article" @default.
• W2105958096 hasAuthorship W2105958096A5006302232 @default.
• W2105958096 hasAuthorship W2105958096A5010410338 @default.
• W2105958096 hasAuthorship W2105958096A5014113718 @default.
• W2105958096 hasAuthorship W2105958096A5027801458 @default.
• W2105958096 hasAuthorship W2105958096A5049951870 @default.
• W2105958096 hasAuthorship W2105958096A5053013839 @default.
• W2105958096 hasConcept C127413603 @default.
• W2105958096 hasConcept C13862629 @default.
• W2105958096 hasConcept C147789679 @default.
• W2105958096 hasConcept C171250308 @default.
• W2105958096 hasConcept C178790620 @default.
• W2105958096 hasConcept C185592680 @default.
• W2105958096 hasConcept C191897082 @default.
• W2105958096 hasConcept C192562407 @default.
• W2105958096 hasConcept C195114451 @default.
• W2105958096 hasConcept C2775913835 @default.
• W2105958096 hasConcept C2777431650 @default.
• W2105958096 hasConcept C2779227376 @default.
• W2105958096 hasConcept C2779851234 @default.
• W2105958096 hasConcept C49040817 @default.
• W2105958096 hasConcept C537208039 @default.
• W2105958096 hasConcept C544153396 @default.
• W2105958096 hasConcept C544956773 @default.
• W2105958096 hasConcept C57410435 @default.
• W2105958096 hasConcept C57863236 @default.
• W2105958096 hasConcept C61696701 @default.
• W2105958096 hasConceptScore W2105958096C127413603 @default.
• W2105958096 hasConceptScore W2105958096C13862629 @default.
• W2105958096 hasConceptScore W2105958096C147789679 @default.
• W2105958096 hasConceptScore W2105958096C171250308 @default.
• W2105958096 hasConceptScore W2105958096C178790620 @default.
• W2105958096 hasConceptScore W2105958096C185592680 @default.
• W2105958096 hasConceptScore W2105958096C191897082 @default.
• W2105958096 hasConceptScore W2105958096C192562407 @default.
• W2105958096 hasConceptScore W2105958096C195114451 @default.
• W2105958096 hasConceptScore W2105958096C2775913835 @default.
• W2105958096 hasConceptScore W2105958096C2777431650 @default.
• W2105958096 hasConceptScore W2105958096C2779227376 @default.
• W2105958096 hasConceptScore W2105958096C2779851234 @default.
• W2105958096 hasConceptScore W2105958096C49040817 @default.
• W2105958096 hasConceptScore W2105958096C537208039 @default.
• W2105958096 hasConceptScore W2105958096C544153396 @default.
• W2105958096 hasConceptScore W2105958096C544956773 @default.
• W2105958096 hasConceptScore W2105958096C57410435 @default.
• W2105958096 hasConceptScore W2105958096C57863236 @default.
• W2105958096 hasConceptScore W2105958096C61696701 @default.
• W2105958096 hasIssue "7" @default.
• W2105958096 hasLocation W21059580961 @default.
• W2105958096 hasOpenAccess W2105958096 @default.
• W2105958096 hasPrimaryLocation W21059580961 @default.
• W2105958096 hasRelatedWork W113211108 @default.
• W2105958096 hasRelatedWork W1963885389 @default.
• W2105958096 hasRelatedWork W1964802375 @default.
• W2105958096 hasRelatedWork W1993440889 @default.
• W2105958096 hasRelatedWork W2139871202 @default.
• W2105958096 hasRelatedWork W2743194952 @default.
• W2105958096 hasRelatedWork W2991955523 @default.
• W2105958096 hasRelatedWork W3008348274 @default.

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