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- W2106014507 abstract "This paper concerns the integration of low-k dielectric SiLK as interconnect insulator with copper metallization. It describes more particularly the impact of hard mask etching on SiLK. It was verified that fluorine based plasma transforms surface of SiLK into fluorinated polymer with interesting properties: organic solvent solutions do not penetrate this layer. However, during the etching step, it was observed that fluorine could physically diffuse into the SiLK volume. This fluorine can be easily removed using a basic aqueous solution." @default.
- W2106014507 created "2016-06-24" @default.
- W2106014507 creator A5037835489 @default.
- W2106014507 creator A5046293542 @default.
- W2106014507 creator A5056623960 @default.
- W2106014507 creator A5061013914 @default.
- W2106014507 creator A5062534253 @default.
- W2106014507 date "2002-11-07" @default.
- W2106014507 modified "2023-09-25" @default.
- W2106014507 title "Effect of fluorinated plasma on SiLK during mineral hard masks etching" @default.
- W2106014507 doi "https://doi.org/10.1109/iitc.2000.854281" @default.
- W2106014507 hasPublicationYear "2002" @default.
- W2106014507 type Work @default.
- W2106014507 sameAs 2106014507 @default.
- W2106014507 citedByCount "0" @default.
- W2106014507 crossrefType "proceedings-article" @default.
- W2106014507 hasAuthorship W2106014507A5037835489 @default.
- W2106014507 hasAuthorship W2106014507A5046293542 @default.
- W2106014507 hasAuthorship W2106014507A5056623960 @default.
- W2106014507 hasAuthorship W2106014507A5061013914 @default.
- W2106014507 hasAuthorship W2106014507A5062534253 @default.
- W2106014507 hasConcept C100460472 @default.
- W2106014507 hasConcept C107187091 @default.
- W2106014507 hasConcept C121332964 @default.
- W2106014507 hasConcept C127413603 @default.
- W2106014507 hasConcept C130472188 @default.
- W2106014507 hasConcept C133386390 @default.
- W2106014507 hasConcept C159985019 @default.
- W2106014507 hasConcept C178790620 @default.
- W2106014507 hasConcept C184651966 @default.
- W2106014507 hasConcept C185592680 @default.
- W2106014507 hasConcept C188027245 @default.
- W2106014507 hasConcept C191897082 @default.
- W2106014507 hasConcept C192562407 @default.
- W2106014507 hasConcept C212702 @default.
- W2106014507 hasConcept C2779227376 @default.
- W2106014507 hasConcept C2780431358 @default.
- W2106014507 hasConcept C2780471494 @default.
- W2106014507 hasConcept C42360764 @default.
- W2106014507 hasConcept C49040817 @default.
- W2106014507 hasConcept C506198293 @default.
- W2106014507 hasConcept C521977710 @default.
- W2106014507 hasConcept C544778455 @default.
- W2106014507 hasConcept C62520636 @default.
- W2106014507 hasConcept C82706917 @default.
- W2106014507 hasConceptScore W2106014507C100460472 @default.
- W2106014507 hasConceptScore W2106014507C107187091 @default.
- W2106014507 hasConceptScore W2106014507C121332964 @default.
- W2106014507 hasConceptScore W2106014507C127413603 @default.
- W2106014507 hasConceptScore W2106014507C130472188 @default.
- W2106014507 hasConceptScore W2106014507C133386390 @default.
- W2106014507 hasConceptScore W2106014507C159985019 @default.
- W2106014507 hasConceptScore W2106014507C178790620 @default.
- W2106014507 hasConceptScore W2106014507C184651966 @default.
- W2106014507 hasConceptScore W2106014507C185592680 @default.
- W2106014507 hasConceptScore W2106014507C188027245 @default.
- W2106014507 hasConceptScore W2106014507C191897082 @default.
- W2106014507 hasConceptScore W2106014507C192562407 @default.
- W2106014507 hasConceptScore W2106014507C212702 @default.
- W2106014507 hasConceptScore W2106014507C2779227376 @default.
- W2106014507 hasConceptScore W2106014507C2780431358 @default.
- W2106014507 hasConceptScore W2106014507C2780471494 @default.
- W2106014507 hasConceptScore W2106014507C42360764 @default.
- W2106014507 hasConceptScore W2106014507C49040817 @default.
- W2106014507 hasConceptScore W2106014507C506198293 @default.
- W2106014507 hasConceptScore W2106014507C521977710 @default.
- W2106014507 hasConceptScore W2106014507C544778455 @default.
- W2106014507 hasConceptScore W2106014507C62520636 @default.
- W2106014507 hasConceptScore W2106014507C82706917 @default.
- W2106014507 hasLocation W21060145071 @default.
- W2106014507 hasOpenAccess W2106014507 @default.
- W2106014507 hasPrimaryLocation W21060145071 @default.
- W2106014507 hasRelatedWork W1971420849 @default.
- W2106014507 hasRelatedWork W1994033349 @default.
- W2106014507 hasRelatedWork W2103560005 @default.
- W2106014507 hasRelatedWork W2146004154 @default.
- W2106014507 hasRelatedWork W1490749050 @default.
- W2106014507 hasRelatedWork W2151604339 @default.
- W2106014507 hasRelatedWork W2277136177 @default.
- W2106014507 hasRelatedWork W2293328512 @default.
- W2106014507 hasRelatedWork W2613752219 @default.
- W2106014507 hasRelatedWork W2752762768 @default.
- W2106014507 hasRelatedWork W2819587048 @default.
- W2106014507 hasRelatedWork W2828922037 @default.
- W2106014507 hasRelatedWork W2855930641 @default.
- W2106014507 hasRelatedWork W2863838441 @default.
- W2106014507 hasRelatedWork W2876806115 @default.
- W2106014507 hasRelatedWork W2879988623 @default.
- W2106014507 hasRelatedWork W2933258042 @default.
- W2106014507 hasRelatedWork W2965545465 @default.
- W2106014507 hasRelatedWork W3101177711 @default.
- W2106014507 hasRelatedWork W3152432484 @default.
- W2106014507 isParatext "false" @default.
- W2106014507 isRetracted "false" @default.
- W2106014507 magId "2106014507" @default.
- W2106014507 workType "article" @default.