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• W2106158595 abstract "Deep-level transient spectroscopy was used to investigate the electrically active defects introduced in n-type Ge during heavy-ion implantation of 160 keV ions. Various noble heavy-ions were used for implantation and the main defects introduced were found to be electron traps with energy levels at EC − 0.09 eV, EC − 0.15 eV and EC − 0.30 eV. Another defect with a level at EC − 0.38 eV, shown to be the E-center (V–Sb defect), is also present in a very low concentration. The main defects in heavy-ion implanted Ge are different from those introduced by MeV electron irradiation, where the main defect is the E-center. Since electron irradiation introduces mainly point defects, this indicates that heavy-ion implantation introduces defects of a more extended nature, such as vacancy and/or interstitial clusters and their combinations with impurities or foreign species in the Ge. We have also demonstrated that these defects are not species related." @default.
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• W2106158595 date "2007-04-01" @default.
• W2106158595 modified "2023-09-27" @default.
• W2106158595 title "Electrical characterization of defects in heavy-ion implanted n-type Ge" @default.
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• W2106158595 doi "https://doi.org/10.1016/j.nimb.2007.01.107" @default.
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