Matches in SemOpenAlex for { <https://semopenalex.org/work/W2106181095> ?p ?o ?g. }
Showing items 1 to 80 of
80
with 100 items per page.
- W2106181095 abstract "An integrable electrostatic microvalve consisting of a curled-up cantilever movable part and a square valve orifice comprising of three pyramidal channels in tandem is presented. The curled-up cantilever, which consists of a silicon dioxide beam with a very thin layer of Cr, is formed by surface micromachining. The valve orifice is fabricated by bulk micromachining in such a way as to merge with the surface micromachining process. This process provided better control of the orifice dimensions. Measured switching voltage of 30 volts has been obtained. Linear flow versus differential pressure characteristics have been obtained from this type of triple tandem pyramidal orifice." @default.
- W2106181095 created "2016-06-24" @default.
- W2106181095 creator A5010538768 @default.
- W2106181095 creator A5034787431 @default.
- W2106181095 creator A5076210471 @default.
- W2106181095 date "2002-11-22" @default.
- W2106181095 modified "2023-10-03" @default.
- W2106181095 title "Integrable active microvalve with surface micromachined curled-up actuator" @default.
- W2106181095 cites W2019014472 @default.
- W2106181095 doi "https://doi.org/10.1109/sensor.1997.635230" @default.
- W2106181095 hasPublicationYear "2002" @default.
- W2106181095 type Work @default.
- W2106181095 sameAs 2106181095 @default.
- W2106181095 citedByCount "9" @default.
- W2106181095 countsByYear W21061810952012 @default.
- W2106181095 crossrefType "proceedings-article" @default.
- W2106181095 hasAuthorship W2106181095A5010538768 @default.
- W2106181095 hasAuthorship W2106181095A5034787431 @default.
- W2106181095 hasAuthorship W2106181095A5076210471 @default.
- W2106181095 hasConcept C119599485 @default.
- W2106181095 hasConcept C127413603 @default.
- W2106181095 hasConcept C136525101 @default.
- W2106181095 hasConcept C141354745 @default.
- W2106181095 hasConcept C142724271 @default.
- W2106181095 hasConcept C145667562 @default.
- W2106181095 hasConcept C159985019 @default.
- W2106181095 hasConcept C172707124 @default.
- W2106181095 hasConcept C192562407 @default.
- W2106181095 hasConcept C194242075 @default.
- W2106181095 hasConcept C204787440 @default.
- W2106181095 hasConcept C2777814067 @default.
- W2106181095 hasConcept C37977207 @default.
- W2106181095 hasConcept C41075158 @default.
- W2106181095 hasConcept C49040817 @default.
- W2106181095 hasConcept C71924100 @default.
- W2106181095 hasConcept C78519656 @default.
- W2106181095 hasConceptScore W2106181095C119599485 @default.
- W2106181095 hasConceptScore W2106181095C127413603 @default.
- W2106181095 hasConceptScore W2106181095C136525101 @default.
- W2106181095 hasConceptScore W2106181095C141354745 @default.
- W2106181095 hasConceptScore W2106181095C142724271 @default.
- W2106181095 hasConceptScore W2106181095C145667562 @default.
- W2106181095 hasConceptScore W2106181095C159985019 @default.
- W2106181095 hasConceptScore W2106181095C172707124 @default.
- W2106181095 hasConceptScore W2106181095C192562407 @default.
- W2106181095 hasConceptScore W2106181095C194242075 @default.
- W2106181095 hasConceptScore W2106181095C204787440 @default.
- W2106181095 hasConceptScore W2106181095C2777814067 @default.
- W2106181095 hasConceptScore W2106181095C37977207 @default.
- W2106181095 hasConceptScore W2106181095C41075158 @default.
- W2106181095 hasConceptScore W2106181095C49040817 @default.
- W2106181095 hasConceptScore W2106181095C71924100 @default.
- W2106181095 hasConceptScore W2106181095C78519656 @default.
- W2106181095 hasLocation W21061810951 @default.
- W2106181095 hasOpenAccess W2106181095 @default.
- W2106181095 hasPrimaryLocation W21061810951 @default.
- W2106181095 hasRelatedWork W2109871639 @default.
- W2106181095 hasRelatedWork W1035909667 @default.
- W2106181095 hasRelatedWork W1504406047 @default.
- W2106181095 hasRelatedWork W1515213443 @default.
- W2106181095 hasRelatedWork W1541686004 @default.
- W2106181095 hasRelatedWork W1557379899 @default.
- W2106181095 hasRelatedWork W1805944071 @default.
- W2106181095 hasRelatedWork W1829993506 @default.
- W2106181095 hasRelatedWork W1854102644 @default.
- W2106181095 hasRelatedWork W1874330039 @default.
- W2106181095 hasRelatedWork W1892534930 @default.
- W2106181095 hasRelatedWork W1919394442 @default.
- W2106181095 hasRelatedWork W1925183498 @default.
- W2106181095 hasRelatedWork W1927903976 @default.
- W2106181095 hasRelatedWork W1945173794 @default.
- W2106181095 hasRelatedWork W1956837395 @default.
- W2106181095 hasRelatedWork W2106762588 @default.
- W2106181095 hasRelatedWork W942867827 @default.
- W2106181095 hasRelatedWork W943971243 @default.
- W2106181095 hasRelatedWork W995015347 @default.
- W2106181095 isParatext "false" @default.
- W2106181095 isRetracted "false" @default.
- W2106181095 magId "2106181095" @default.
- W2106181095 workType "article" @default.