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- W2106370892 abstract "Continuous wave excitation cavity ring-down spectroscopy (CW-CRDS) is being developed for real time chemical sensing of volatile CVD byproducts (e.g. HF, H/sub 2/O) and as a quantitative and robust metrology tool for advanced process control methodologies." @default.
- W2106370892 created "2016-06-24" @default.
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- W2106370892 date "2002-11-07" @default.
- W2106370892 modified "2023-09-25" @default.
- W2106370892 title "Application of CW-CRDS to monitor and control chemical vapor deposition" @default.
- W2106370892 cites W1989504858 @default.
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- W2106370892 doi "https://doi.org/10.1109/leosst.2000.869712" @default.
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