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- W2106371122 abstract "We present the very high frequency (VHF) operation of a nano-mechanical double-ended tuning fork resonator (DETF), in which two fin field effect transistors (FinFET) are co-integrated. We benefit from the excellent mixing properties of the FinFET to characterize accurately its fundamental resonance (f <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>0</sub> =113 MHz) and quality factor (Q=1300) and compare these results with clamped-clamped (cc-) beam FinFET resonators of similar dimensions. We find the tuning fork design to be superior in terms of Q-factors, transconductance and available on-current." @default.
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- W2106371122 date "2011-06-01" @default.
- W2106371122 modified "2023-10-16" @default.
- W2106371122 title "Very high frequency double-ended tuning fork nano-mechanical Fin-FET resonator" @default.
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- W2106371122 doi "https://doi.org/10.1109/transducers.2011.5969677" @default.
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