Matches in SemOpenAlex for { <https://semopenalex.org/work/W2106818951> ?p ?o ?g. }
Showing items 1 to 92 of
92
with 100 items per page.
- W2106818951 endingPage "141" @default.
- W2106818951 startingPage "139" @default.
- W2106818951 abstract "<para xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink> Teflon AF thin films have been directly patterned by electron-beam lithography without the need for chemical development. The pattern depth was found to be linearly related to exposure dose and increases with increasing film thickness. Features as small as 200 nm have been resolved. Fourier transform infrared measurements indicate that the electron-beam-induced patterning is related to degradation of the fluorinated dioxole group present in amorphous Teflon. </para>" @default.
- W2106818951 created "2016-06-24" @default.
- W2106818951 creator A5024014930 @default.
- W2106818951 creator A5029160325 @default.
- W2106818951 creator A5057121777 @default.
- W2106818951 creator A5081381497 @default.
- W2106818951 date "2009-03-01" @default.
- W2106818951 modified "2023-09-26" @default.
- W2106818951 title "Direct Electron-Beam Patterning of Teflon AF" @default.
- W2106818951 cites W1964959867 @default.
- W2106818951 cites W1992195782 @default.
- W2106818951 cites W2007996522 @default.
- W2106818951 cites W2063838338 @default.
- W2106818951 cites W2072135476 @default.
- W2106818951 cites W2079537698 @default.
- W2106818951 cites W2084278794 @default.
- W2106818951 cites W2091829350 @default.
- W2106818951 cites W2123275813 @default.
- W2106818951 cites W2168680947 @default.
- W2106818951 doi "https://doi.org/10.1109/tnano.2009.2013137" @default.
- W2106818951 hasPublicationYear "2009" @default.
- W2106818951 type Work @default.
- W2106818951 sameAs 2106818951 @default.
- W2106818951 citedByCount "9" @default.
- W2106818951 countsByYear W21068189512012 @default.
- W2106818951 countsByYear W21068189512013 @default.
- W2106818951 countsByYear W21068189512015 @default.
- W2106818951 countsByYear W21068189512017 @default.
- W2106818951 countsByYear W21068189512019 @default.
- W2106818951 countsByYear W21068189512020 @default.
- W2106818951 crossrefType "journal-article" @default.
- W2106818951 hasAuthorship W2106818951A5024014930 @default.
- W2106818951 hasAuthorship W2106818951A5029160325 @default.
- W2106818951 hasAuthorship W2106818951A5057121777 @default.
- W2106818951 hasAuthorship W2106818951A5081381497 @default.
- W2106818951 hasConcept C120665830 @default.
- W2106818951 hasConcept C121332964 @default.
- W2106818951 hasConcept C147120987 @default.
- W2106818951 hasConcept C158355884 @default.
- W2106818951 hasConcept C160892712 @default.
- W2106818951 hasConcept C168834538 @default.
- W2106818951 hasConcept C171250308 @default.
- W2106818951 hasConcept C185592680 @default.
- W2106818951 hasConcept C192562407 @default.
- W2106818951 hasConcept C200274948 @default.
- W2106818951 hasConcept C204223013 @default.
- W2106818951 hasConcept C2779227376 @default.
- W2106818951 hasConcept C49040817 @default.
- W2106818951 hasConcept C53524968 @default.
- W2106818951 hasConcept C56052488 @default.
- W2106818951 hasConcept C62520636 @default.
- W2106818951 hasConcept C8010536 @default.
- W2106818951 hasConcept C95312477 @default.
- W2106818951 hasConceptScore W2106818951C120665830 @default.
- W2106818951 hasConceptScore W2106818951C121332964 @default.
- W2106818951 hasConceptScore W2106818951C147120987 @default.
- W2106818951 hasConceptScore W2106818951C158355884 @default.
- W2106818951 hasConceptScore W2106818951C160892712 @default.
- W2106818951 hasConceptScore W2106818951C168834538 @default.
- W2106818951 hasConceptScore W2106818951C171250308 @default.
- W2106818951 hasConceptScore W2106818951C185592680 @default.
- W2106818951 hasConceptScore W2106818951C192562407 @default.
- W2106818951 hasConceptScore W2106818951C200274948 @default.
- W2106818951 hasConceptScore W2106818951C204223013 @default.
- W2106818951 hasConceptScore W2106818951C2779227376 @default.
- W2106818951 hasConceptScore W2106818951C49040817 @default.
- W2106818951 hasConceptScore W2106818951C53524968 @default.
- W2106818951 hasConceptScore W2106818951C56052488 @default.
- W2106818951 hasConceptScore W2106818951C62520636 @default.
- W2106818951 hasConceptScore W2106818951C8010536 @default.
- W2106818951 hasConceptScore W2106818951C95312477 @default.
- W2106818951 hasIssue "2" @default.
- W2106818951 hasLocation W21068189511 @default.
- W2106818951 hasOpenAccess W2106818951 @default.
- W2106818951 hasPrimaryLocation W21068189511 @default.
- W2106818951 hasRelatedWork W1974007283 @default.
- W2106818951 hasRelatedWork W1981300499 @default.
- W2106818951 hasRelatedWork W2005579321 @default.
- W2106818951 hasRelatedWork W2021670711 @default.
- W2106818951 hasRelatedWork W2035092861 @default.
- W2106818951 hasRelatedWork W2060218775 @default.
- W2106818951 hasRelatedWork W2068984851 @default.
- W2106818951 hasRelatedWork W2088280212 @default.
- W2106818951 hasRelatedWork W2092404174 @default.
- W2106818951 hasRelatedWork W2381201749 @default.
- W2106818951 hasVolume "8" @default.
- W2106818951 isParatext "false" @default.
- W2106818951 isRetracted "false" @default.
- W2106818951 magId "2106818951" @default.
- W2106818951 workType "article" @default.