Matches in SemOpenAlex for { <https://semopenalex.org/work/W2106866500> ?p ?o ?g. }
Showing items 1 to 66 of
66
with 100 items per page.
- W2106866500 abstract "This paper presents the application of picosecond laser ultrasonics for integrated circuit inspection and failure analysis. The technique is described and illustrated with several results. The potential for metal and inter-metal layers metrology in the context of process characterization is illustrated" @default.
- W2106866500 created "2016-06-24" @default.
- W2106866500 creator A5016635276 @default.
- W2106866500 creator A5017023749 @default.
- W2106866500 creator A5020129685 @default.
- W2106866500 creator A5043837649 @default.
- W2106866500 creator A5050122105 @default.
- W2106866500 creator A5080893707 @default.
- W2106866500 date "2006-03-22" @default.
- W2106866500 modified "2023-10-17" @default.
- W2106866500 title "Intra-IC Inspection and Metrology with Picosecond Laser Ultrasonics" @default.
- W2106866500 cites W2055344453 @default.
- W2106866500 cites W2109470070 @default.
- W2106866500 cites W2120610658 @default.
- W2106866500 cites W2134526084 @default.
- W2106866500 cites W2137447746 @default.
- W2106866500 cites W2157805932 @default.
- W2106866500 cites W2161209923 @default.
- W2106866500 cites W2172551139 @default.
- W2106866500 doi "https://doi.org/10.1109/imtc.2005.1604575" @default.
- W2106866500 hasPublicationYear "2006" @default.
- W2106866500 type Work @default.
- W2106866500 sameAs 2106866500 @default.
- W2106866500 citedByCount "0" @default.
- W2106866500 crossrefType "proceedings-article" @default.
- W2106866500 hasAuthorship W2106866500A5016635276 @default.
- W2106866500 hasAuthorship W2106866500A5017023749 @default.
- W2106866500 hasAuthorship W2106866500A5020129685 @default.
- W2106866500 hasAuthorship W2106866500A5043837649 @default.
- W2106866500 hasAuthorship W2106866500A5050122105 @default.
- W2106866500 hasAuthorship W2106866500A5080893707 @default.
- W2106866500 hasConcept C120665830 @default.
- W2106866500 hasConcept C121332964 @default.
- W2106866500 hasConcept C127413603 @default.
- W2106866500 hasConcept C192562407 @default.
- W2106866500 hasConcept C195766429 @default.
- W2106866500 hasConcept C24326235 @default.
- W2106866500 hasConcept C520434653 @default.
- W2106866500 hasConcept C55005982 @default.
- W2106866500 hasConceptScore W2106866500C120665830 @default.
- W2106866500 hasConceptScore W2106866500C121332964 @default.
- W2106866500 hasConceptScore W2106866500C127413603 @default.
- W2106866500 hasConceptScore W2106866500C192562407 @default.
- W2106866500 hasConceptScore W2106866500C195766429 @default.
- W2106866500 hasConceptScore W2106866500C24326235 @default.
- W2106866500 hasConceptScore W2106866500C520434653 @default.
- W2106866500 hasConceptScore W2106866500C55005982 @default.
- W2106866500 hasLocation W21068665001 @default.
- W2106866500 hasLocation W21068665002 @default.
- W2106866500 hasLocation W21068665003 @default.
- W2106866500 hasOpenAccess W2106866500 @default.
- W2106866500 hasPrimaryLocation W21068665001 @default.
- W2106866500 hasRelatedWork W161161642 @default.
- W2106866500 hasRelatedWork W1998546186 @default.
- W2106866500 hasRelatedWork W2016841775 @default.
- W2106866500 hasRelatedWork W2737498735 @default.
- W2106866500 hasRelatedWork W2744391499 @default.
- W2106866500 hasRelatedWork W2898370298 @default.
- W2106866500 hasRelatedWork W2899084033 @default.
- W2106866500 hasRelatedWork W3120461830 @default.
- W2106866500 hasRelatedWork W4292492973 @default.
- W2106866500 hasRelatedWork W2061967405 @default.
- W2106866500 isParatext "false" @default.
- W2106866500 isRetracted "false" @default.
- W2106866500 magId "2106866500" @default.
- W2106866500 workType "article" @default.