Matches in SemOpenAlex for { <https://semopenalex.org/work/W2106875657> ?p ?o ?g. }
Showing items 1 to 94 of
94
with 100 items per page.
- W2106875657 abstract "The goal of this work was to develop a heat exchanger for a nine chip multi-chip module (MCM) with high temperature superconductor (HTS) interconnects, which was capable of removing 50 W/cm/sup 2/ and maintain a temperature of 80/spl deg/K. This was accomplished by forming anisotropically etched 45 /spl mu/m wide by 240 to 290 /spl mu/m deep by 5 mm long channels into a orientation silicon wafer. These channels were spaced 40 /spl mu/m apart to form an efficient cooling fin structure. The silicon wafer was covered with a pyrex plate and anodically bonded to form parallel channels. Kovar fittings were attached to the pyrex plate to flow liquid nitrogen (LN/sub 2/) into the holes made in the pyrex and then through the silicon micro channel structure. This heat exchanger design is very similar to one previously developed by Tuckermann and Pease (1981), with the exceptions of the use of cryogenic temperatures, improved alignment accuracy to the {111} planes, and the HTS interconnect application. The module has been tested with polysilicon resistors as the heat source, and with a 30 W source the measured thermal resistance was well below 1/spl deg/K/W." @default.
- W2106875657 created "2016-06-24" @default.
- W2106875657 creator A5026459097 @default.
- W2106875657 creator A5039962254 @default.
- W2106875657 creator A5076544607 @default.
- W2106875657 date "2002-11-22" @default.
- W2106875657 modified "2023-09-25" @default.
- W2106875657 title "Silicon micromachined heat exchanger for MCMs with high temperature superconductors" @default.
- W2106875657 cites W1494367753 @default.
- W2106875657 cites W1568890842 @default.
- W2106875657 cites W1670172520 @default.
- W2106875657 cites W2005726924 @default.
- W2106875657 cites W2008940261 @default.
- W2106875657 cites W2060397787 @default.
- W2106875657 cites W2072982456 @default.
- W2106875657 cites W2098393280 @default.
- W2106875657 cites W2131722625 @default.
- W2106875657 cites W2156259175 @default.
- W2106875657 doi "https://doi.org/10.1109/ugim.1997.616714" @default.
- W2106875657 hasPublicationYear "2002" @default.
- W2106875657 type Work @default.
- W2106875657 sameAs 2106875657 @default.
- W2106875657 citedByCount "1" @default.
- W2106875657 crossrefType "proceedings-article" @default.
- W2106875657 hasAuthorship W2106875657A5026459097 @default.
- W2106875657 hasAuthorship W2106875657A5039962254 @default.
- W2106875657 hasAuthorship W2106875657A5076544607 @default.
- W2106875657 hasConcept C107706546 @default.
- W2106875657 hasConcept C119599485 @default.
- W2106875657 hasConcept C121332964 @default.
- W2106875657 hasConcept C127413603 @default.
- W2106875657 hasConcept C136525101 @default.
- W2106875657 hasConcept C137488568 @default.
- W2106875657 hasConcept C137693562 @default.
- W2106875657 hasConcept C142724271 @default.
- W2106875657 hasConcept C145667562 @default.
- W2106875657 hasConcept C153294291 @default.
- W2106875657 hasConcept C160671074 @default.
- W2106875657 hasConcept C165801399 @default.
- W2106875657 hasConcept C192562407 @default.
- W2106875657 hasConcept C204530211 @default.
- W2106875657 hasConcept C204787440 @default.
- W2106875657 hasConcept C48632124 @default.
- W2106875657 hasConcept C49040817 @default.
- W2106875657 hasConcept C544956773 @default.
- W2106875657 hasConcept C71924100 @default.
- W2106875657 hasConcept C78519656 @default.
- W2106875657 hasConceptScore W2106875657C107706546 @default.
- W2106875657 hasConceptScore W2106875657C119599485 @default.
- W2106875657 hasConceptScore W2106875657C121332964 @default.
- W2106875657 hasConceptScore W2106875657C127413603 @default.
- W2106875657 hasConceptScore W2106875657C136525101 @default.
- W2106875657 hasConceptScore W2106875657C137488568 @default.
- W2106875657 hasConceptScore W2106875657C137693562 @default.
- W2106875657 hasConceptScore W2106875657C142724271 @default.
- W2106875657 hasConceptScore W2106875657C145667562 @default.
- W2106875657 hasConceptScore W2106875657C153294291 @default.
- W2106875657 hasConceptScore W2106875657C160671074 @default.
- W2106875657 hasConceptScore W2106875657C165801399 @default.
- W2106875657 hasConceptScore W2106875657C192562407 @default.
- W2106875657 hasConceptScore W2106875657C204530211 @default.
- W2106875657 hasConceptScore W2106875657C204787440 @default.
- W2106875657 hasConceptScore W2106875657C48632124 @default.
- W2106875657 hasConceptScore W2106875657C49040817 @default.
- W2106875657 hasConceptScore W2106875657C544956773 @default.
- W2106875657 hasConceptScore W2106875657C71924100 @default.
- W2106875657 hasConceptScore W2106875657C78519656 @default.
- W2106875657 hasLocation W21068756571 @default.
- W2106875657 hasOpenAccess W2106875657 @default.
- W2106875657 hasPrimaryLocation W21068756571 @default.
- W2106875657 hasRelatedWork W1518398555 @default.
- W2106875657 hasRelatedWork W155915758 @default.
- W2106875657 hasRelatedWork W1610521166 @default.
- W2106875657 hasRelatedWork W1884659743 @default.
- W2106875657 hasRelatedWork W1995065282 @default.
- W2106875657 hasRelatedWork W2027285485 @default.
- W2106875657 hasRelatedWork W2095896523 @default.
- W2106875657 hasRelatedWork W2096027898 @default.
- W2106875657 hasRelatedWork W2120767715 @default.
- W2106875657 hasRelatedWork W2128534144 @default.
- W2106875657 hasRelatedWork W2129623054 @default.
- W2106875657 hasRelatedWork W2130872249 @default.
- W2106875657 hasRelatedWork W2132656098 @default.
- W2106875657 hasRelatedWork W2137936401 @default.
- W2106875657 hasRelatedWork W2138277104 @default.
- W2106875657 hasRelatedWork W2151725144 @default.
- W2106875657 hasRelatedWork W2156007296 @default.
- W2106875657 hasRelatedWork W2169279251 @default.
- W2106875657 hasRelatedWork W2208758422 @default.
- W2106875657 hasRelatedWork W2137979477 @default.
- W2106875657 isParatext "false" @default.
- W2106875657 isRetracted "false" @default.
- W2106875657 magId "2106875657" @default.
- W2106875657 workType "article" @default.