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- W2106956830 abstract "We demonstrate the first photonic chip designed for a commercial bulk CMOS process (65 nm-node) using standard process layers combined with post-processing, enabling dense photonic integration with high-performance microprocessor electronics." @default.
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- W2106956830 date "2009-09-01" @default.
- W2106956830 modified "2023-10-05" @default.
- W2106956830 title "Photonic integration in a commercial scaled bulk-CMOS process" @default.
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- W2106956830 doi "https://doi.org/10.1109/ps.2009.5307769" @default.
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