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- W2106989382 abstract "A condenser system couples the radiation source to an imaging system, controlling the uniformity and partial coherence at the object, which ultimately affects the characteristics of the aerial image. A soft-x-ray projection lithography system based on a ring-field imaging system and a laser-produced plasma x-ray source places considerable constraints on the design of a condenser system. Two designs are proposed, critical illumination and Köhler illumination, each of which requires three mirrors and scanning for covering the entire ring field with the required uniformity and partial coherence. Images based on Hopkins’ formulation of partially coherent imaging are simulated." @default.
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- W2106989382 title "Condenser optics, partial coherence, and imaging for soft-x-ray projection lithography" @default.
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- W2106989382 doi "https://doi.org/10.1364/ao.32.006938" @default.
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