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• W2107084311 abstract "We synthesized a series of epoxysiloxane oligomers with controllable viscosity and polarity and developed upon them a thermal-curable nanoimprint resist that was cross-linked in air at 110°C within 30 s if preexposed to UV light. The oligomers were designed and synthesized via hydrosilylation of 4-vinyl-cyclohexane-1,2-epoxide with poly(methylhydrosiloxane) with tunable viscosity, polarity, and cross-linking density. The resist exhibits excellent chemical and physical properties such as insensitivity toward oxygen, strong mechanical strength, and high etching resistance. Using this resist, nanoscale patterns of different geometries with feature sizes as small as 30 nm were fabricated via a nanoimprint process based on UV-assisted thermal curing. The curing time for the resist was on the order of 10 s at a moderate temperature with the help of UV light preexposure. This fast thermal curing speed was attributed to the large number of active cations generated upon UV exposure that facilitated the thermal polymerization process." @default.
• W2107084311 created "2016-06-24" @default.
• W2107084311 creator A5023376483 @default.
• W2107084311 creator A5044224050 @default.
• W2107084311 creator A5056800628 @default.
• W2107084311 creator A5060291190 @default.
• W2107084311 creator A5060592860 @default.
• W2107084311 creator A5061115206 @default.
• W2107084311 creator A5067347622 @default.
• W2107084311 creator A5071713669 @default.
• W2107084311 creator A5082902686 @default.
• W2107084311 date "2012-07-09" @default.
• W2107084311 modified "2023-09-26" @default.
• W2107084311 title "A fast thermal-curing nanoimprint resist based on cationic polymerizable epoxysiloxane" @default.
• W2107084311 cites W1978733559 @default.
• W2107084311 cites W2005485153 @default.
• W2107084311 cites W2007923833 @default.
• W2107084311 cites W2010470226 @default.
• W2107084311 cites W2018718187 @default.
• W2107084311 cites W2020895785 @default.
• W2107084311 cites W2022948920 @default.
• W2107084311 cites W2024663172 @default.
• W2107084311 cites W2024983953 @default.
• W2107084311 cites W2030199863 @default.
• W2107084311 cites W2046574064 @default.
• W2107084311 cites W2047805172 @default.
• W2107084311 cites W2062047511 @default.
• W2107084311 cites W2062074587 @default.
• W2107084311 cites W2066013916 @default.
• W2107084311 cites W2067999970 @default.
• W2107084311 cites W2068174584 @default.
• W2107084311 cites W2071856452 @default.
• W2107084311 cites W2072987543 @default.
• W2107084311 cites W2075426913 @default.
• W2107084311 cites W2077907610 @default.
• W2107084311 cites W2082566877 @default.
• W2107084311 cites W2088899554 @default.
• W2107084311 cites W2090641759 @default.
• W2107084311 cites W2139394714 @default.
• W2107084311 cites W2139516044 @default.
• W2107084311 cites W1998950570 @default.
• W2107084311 doi "https://doi.org/10.1186/1556-276x-7-380" @default.
• W2107084311 hasPubMedCentralId "https://www.ncbi.nlm.nih.gov/pmc/articles/3496635" @default.
• W2107084311 hasPubMedId "https://pubmed.ncbi.nlm.nih.gov/22775987" @default.
• W2107084311 hasPublicationYear "2012" @default.
• W2107084311 type Work @default.
• W2107084311 sameAs 2107084311 @default.
• W2107084311 citedByCount "5" @default.
• W2107084311 countsByYear W21070843112016 @default.
• W2107084311 countsByYear W21070843112017 @default.
• W2107084311 countsByYear W21070843112020 @default.
• W2107084311 countsByYear W21070843112022 @default.
• W2107084311 crossrefType "journal-article" @default.
• W2107084311 hasAuthorship W2107084311A5023376483 @default.
• W2107084311 hasAuthorship W2107084311A5044224050 @default.
• W2107084311 hasAuthorship W2107084311A5056800628 @default.
• W2107084311 hasAuthorship W2107084311A5060291190 @default.
• W2107084311 hasAuthorship W2107084311A5060592860 @default.
• W2107084311 hasAuthorship W2107084311A5061115206 @default.
• W2107084311 hasAuthorship W2107084311A5067347622 @default.
• W2107084311 hasAuthorship W2107084311A5071713669 @default.
• W2107084311 hasAuthorship W2107084311A5082902686 @default.
• W2107084311 hasBestOaLocation W21070843111 @default.
• W2107084311 hasConcept C121332964 @default.
• W2107084311 hasConcept C127413603 @default.
• W2107084311 hasConcept C132976073 @default.
• W2107084311 hasConcept C136525101 @default.
• W2107084311 hasConcept C142724271 @default.
• W2107084311 hasConcept C153294291 @default.
• W2107084311 hasConcept C159985019 @default.
• W2107084311 hasConcept C171250308 @default.
• W2107084311 hasConcept C183882617 @default.
• W2107084311 hasConcept C188027245 @default.
• W2107084311 hasConcept C192562407 @default.
• W2107084311 hasConcept C204530211 @default.
• W2107084311 hasConcept C204787440 @default.
• W2107084311 hasConcept C2777046567 @default.
• W2107084311 hasConcept C2779227376 @default.
• W2107084311 hasConcept C42360764 @default.
• W2107084311 hasConcept C44228677 @default.
• W2107084311 hasConcept C521977710 @default.
• W2107084311 hasConcept C53524968 @default.
• W2107084311 hasConcept C71924100 @default.
• W2107084311 hasConceptScore W2107084311C121332964 @default.
• W2107084311 hasConceptScore W2107084311C127413603 @default.
• W2107084311 hasConceptScore W2107084311C132976073 @default.
• W2107084311 hasConceptScore W2107084311C136525101 @default.
• W2107084311 hasConceptScore W2107084311C142724271 @default.
• W2107084311 hasConceptScore W2107084311C153294291 @default.
• W2107084311 hasConceptScore W2107084311C159985019 @default.
• W2107084311 hasConceptScore W2107084311C171250308 @default.
• W2107084311 hasConceptScore W2107084311C183882617 @default.
• W2107084311 hasConceptScore W2107084311C188027245 @default.
• W2107084311 hasConceptScore W2107084311C192562407 @default.
• W2107084311 hasConceptScore W2107084311C204530211 @default.
• W2107084311 hasConceptScore W2107084311C204787440 @default.
• W2107084311 hasConceptScore W2107084311C2777046567 @default.
• W2107084311 hasConceptScore W2107084311C2779227376 @default.
• W2107084311 hasConceptScore W2107084311C42360764 @default.
• W2107084311 hasConceptScore W2107084311C44228677 @default.

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