Matches in SemOpenAlex for { <https://semopenalex.org/work/W2107098594> ?p ?o ?g. }
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- W2107098594 endingPage "2571" @default.
- W2107098594 startingPage "2562" @default.
- W2107098594 abstract "Tetraethoxysilane/oxygen (TEOS/O2) chemistries are now used for low plasma enhanced chemical vapor deposition (PECVD) of SiO2 when high conformality and low temperature are required. The surface processes leading to film growth, carbon elimination, and conformality are not well characterized. We have developed a model to investigate the surface kinetics of the PECVD of SiO2 films using TEOS/O2 chemistry. The model includes precursor adsorption and desorption, densification of the film, void formation, pyrolysis, plasma surface interactions, and geometric shadowing. Results for growth rate, fraction of carbon retained in the film, film conformality, and film roughness are discussed." @default.
- W2107098594 created "2016-06-24" @default.
- W2107098594 creator A5009306289 @default.
- W2107098594 creator A5088888465 @default.
- W2107098594 date "1993-09-01" @default.
- W2107098594 modified "2023-09-26" @default.
- W2107098594 title "Monte Carlo simulation of surface kinetics during plasma enhanced chemical vapor deposition of SiO2 using oxygen/tetraethoxysilane chemistry" @default.
- W2107098594 doi "https://doi.org/10.1116/1.578607" @default.
- W2107098594 hasPublicationYear "1993" @default.
- W2107098594 type Work @default.
- W2107098594 sameAs 2107098594 @default.
- W2107098594 citedByCount "41" @default.
- W2107098594 countsByYear W21070985942013 @default.
- W2107098594 countsByYear W21070985942016 @default.
- W2107098594 countsByYear W21070985942017 @default.
- W2107098594 countsByYear W21070985942018 @default.
- W2107098594 countsByYear W21070985942019 @default.
- W2107098594 countsByYear W21070985942022 @default.
- W2107098594 countsByYear W21070985942023 @default.
- W2107098594 crossrefType "journal-article" @default.
- W2107098594 hasAuthorship W2107098594A5009306289 @default.
- W2107098594 hasAuthorship W2107098594A5088888465 @default.
- W2107098594 hasConcept C104779481 @default.
- W2107098594 hasConcept C107365816 @default.
- W2107098594 hasConcept C121332964 @default.
- W2107098594 hasConcept C127413603 @default.
- W2107098594 hasConcept C140205800 @default.
- W2107098594 hasConcept C147789679 @default.
- W2107098594 hasConcept C148898269 @default.
- W2107098594 hasConcept C150394285 @default.
- W2107098594 hasConcept C159985019 @default.
- W2107098594 hasConcept C162711632 @default.
- W2107098594 hasConcept C171250308 @default.
- W2107098594 hasConcept C178790620 @default.
- W2107098594 hasConcept C185592680 @default.
- W2107098594 hasConcept C192562407 @default.
- W2107098594 hasConcept C36759035 @default.
- W2107098594 hasConcept C38347018 @default.
- W2107098594 hasConcept C42360764 @default.
- W2107098594 hasConcept C540031477 @default.
- W2107098594 hasConcept C57410435 @default.
- W2107098594 hasConcept C62520636 @default.
- W2107098594 hasConcept C82706917 @default.
- W2107098594 hasConceptScore W2107098594C104779481 @default.
- W2107098594 hasConceptScore W2107098594C107365816 @default.
- W2107098594 hasConceptScore W2107098594C121332964 @default.
- W2107098594 hasConceptScore W2107098594C127413603 @default.
- W2107098594 hasConceptScore W2107098594C140205800 @default.
- W2107098594 hasConceptScore W2107098594C147789679 @default.
- W2107098594 hasConceptScore W2107098594C148898269 @default.
- W2107098594 hasConceptScore W2107098594C150394285 @default.
- W2107098594 hasConceptScore W2107098594C159985019 @default.
- W2107098594 hasConceptScore W2107098594C162711632 @default.
- W2107098594 hasConceptScore W2107098594C171250308 @default.
- W2107098594 hasConceptScore W2107098594C178790620 @default.
- W2107098594 hasConceptScore W2107098594C185592680 @default.
- W2107098594 hasConceptScore W2107098594C192562407 @default.
- W2107098594 hasConceptScore W2107098594C36759035 @default.
- W2107098594 hasConceptScore W2107098594C38347018 @default.
- W2107098594 hasConceptScore W2107098594C42360764 @default.
- W2107098594 hasConceptScore W2107098594C540031477 @default.
- W2107098594 hasConceptScore W2107098594C57410435 @default.
- W2107098594 hasConceptScore W2107098594C62520636 @default.
- W2107098594 hasConceptScore W2107098594C82706917 @default.
- W2107098594 hasIssue "5" @default.
- W2107098594 hasLocation W21070985941 @default.
- W2107098594 hasOpenAccess W2107098594 @default.
- W2107098594 hasPrimaryLocation W21070985941 @default.
- W2107098594 hasRelatedWork W1965779276 @default.
- W2107098594 hasRelatedWork W1999557426 @default.
- W2107098594 hasRelatedWork W2007047162 @default.
- W2107098594 hasRelatedWork W2010954885 @default.
- W2107098594 hasRelatedWork W2053469373 @default.
- W2107098594 hasRelatedWork W2056604271 @default.
- W2107098594 hasRelatedWork W2094537462 @default.
- W2107098594 hasRelatedWork W2748952813 @default.
- W2107098594 hasRelatedWork W4224436599 @default.
- W2107098594 hasRelatedWork W4379013386 @default.
- W2107098594 hasVolume "11" @default.
- W2107098594 isParatext "false" @default.
- W2107098594 isRetracted "false" @default.
- W2107098594 magId "2107098594" @default.
- W2107098594 workType "article" @default.