Matches in SemOpenAlex for { <https://semopenalex.org/work/W2107453856> ?p ?o ?g. }
Showing items 1 to 72 of
72
with 100 items per page.
- W2107453856 abstract "Analysis of slanted beam MEMS capacitive accelerometer structures has been presented in this paper. A new structure has been proposed to be used for high g applications up to plusmn30 g. The proposed new structure has been compared with three other different structures. All the four structures were simulated using CoventorWare TM 2005 and their performance characteristics were compared. It has been found that other three structures are found suitable only for low g applications up to plusmn2 g. One among the four designs known as single beam structure was successfully fabricated in a single step anisotropic wet chemical etching in aqueous KOH solution using plane as physical etch stop." @default.
- W2107453856 created "2016-06-24" @default.
- W2107453856 creator A5045975824 @default.
- W2107453856 creator A5056231587 @default.
- W2107453856 date "2007-10-01" @default.
- W2107453856 modified "2023-10-14" @default.
- W2107453856 title "Structural sensitivity analysis of slanted beam MEMS capacitive accelerometers" @default.
- W2107453856 cites W1605586895 @default.
- W2107453856 cites W2036103468 @default.
- W2107453856 cites W2087020924 @default.
- W2107453856 cites W2087085105 @default.
- W2107453856 cites W2102006204 @default.
- W2107453856 cites W2113767002 @default.
- W2107453856 cites W2134033443 @default.
- W2107453856 doi "https://doi.org/10.1109/tencon.2007.4429166" @default.
- W2107453856 hasPublicationYear "2007" @default.
- W2107453856 type Work @default.
- W2107453856 sameAs 2107453856 @default.
- W2107453856 citedByCount "1" @default.
- W2107453856 countsByYear W21074538562014 @default.
- W2107453856 crossrefType "proceedings-article" @default.
- W2107453856 hasAuthorship W2107453856A5045975824 @default.
- W2107453856 hasAuthorship W2107453856A5056231587 @default.
- W2107453856 hasConcept C100460472 @default.
- W2107453856 hasConcept C111919701 @default.
- W2107453856 hasConcept C119599485 @default.
- W2107453856 hasConcept C127413603 @default.
- W2107453856 hasConcept C159985019 @default.
- W2107453856 hasConcept C168834538 @default.
- W2107453856 hasConcept C192562407 @default.
- W2107453856 hasConcept C206755178 @default.
- W2107453856 hasConcept C21200559 @default.
- W2107453856 hasConcept C24326235 @default.
- W2107453856 hasConcept C2779227376 @default.
- W2107453856 hasConcept C37977207 @default.
- W2107453856 hasConcept C41008148 @default.
- W2107453856 hasConcept C49040817 @default.
- W2107453856 hasConcept C66938386 @default.
- W2107453856 hasConcept C89805583 @default.
- W2107453856 hasConceptScore W2107453856C100460472 @default.
- W2107453856 hasConceptScore W2107453856C111919701 @default.
- W2107453856 hasConceptScore W2107453856C119599485 @default.
- W2107453856 hasConceptScore W2107453856C127413603 @default.
- W2107453856 hasConceptScore W2107453856C159985019 @default.
- W2107453856 hasConceptScore W2107453856C168834538 @default.
- W2107453856 hasConceptScore W2107453856C192562407 @default.
- W2107453856 hasConceptScore W2107453856C206755178 @default.
- W2107453856 hasConceptScore W2107453856C21200559 @default.
- W2107453856 hasConceptScore W2107453856C24326235 @default.
- W2107453856 hasConceptScore W2107453856C2779227376 @default.
- W2107453856 hasConceptScore W2107453856C37977207 @default.
- W2107453856 hasConceptScore W2107453856C41008148 @default.
- W2107453856 hasConceptScore W2107453856C49040817 @default.
- W2107453856 hasConceptScore W2107453856C66938386 @default.
- W2107453856 hasConceptScore W2107453856C89805583 @default.
- W2107453856 hasLocation W21074538561 @default.
- W2107453856 hasOpenAccess W2107453856 @default.
- W2107453856 hasPrimaryLocation W21074538561 @default.
- W2107453856 hasRelatedWork W1981205801 @default.
- W2107453856 hasRelatedWork W2162753646 @default.
- W2107453856 hasRelatedWork W2382520238 @default.
- W2107453856 hasRelatedWork W2608715582 @default.
- W2107453856 hasRelatedWork W2766357162 @default.
- W2107453856 hasRelatedWork W2767067586 @default.
- W2107453856 hasRelatedWork W2795395678 @default.
- W2107453856 hasRelatedWork W3039462591 @default.
- W2107453856 hasRelatedWork W4214534073 @default.
- W2107453856 hasRelatedWork W2416817555 @default.
- W2107453856 isParatext "false" @default.
- W2107453856 isRetracted "false" @default.
- W2107453856 magId "2107453856" @default.
- W2107453856 workType "article" @default.