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Matches in SemOpenAlex for { <https://semopenalex.org/work/W2107455584> ?p ?o ?g. }

• W2107455584 abstract "Sputtering process optimization is described as related to steady-state production of VLSI and ULSI devices using isolated deposition modules in a production environment. Improvements in step coverage for Al-1%-Si, obtained over VLSI and ULSI level topology typical of 1-Mb to 16-Mb semiconductor devices, are described, and data are presented. Techniques for improving the average step coverage and the worst-case step coverage over 1- mu m-thick BPSG contact openings are discussed. The process improvements require the use of isolated processing chambers for specific processing steps in the appropriate chambers. By taking advantage of the isolated processing chambers and fine tuning various process settings, the worst-case step coverage was improved from 25 to 40% for a typical VLSI topology. These techniques were also effective in reducing step coverage over opposing contact-opening sidewalls across the wafer. The factors and deposition conditions responsible for these improvements are presented. Corresponding data on grain size and silicon nodule size as a function of deposition conditions after contact alloy are presented. >" @default.
• W2107455584 created "2016-06-24" @default.
• W2107455584 creator A5004387373 @default.
• W2107455584 creator A5004810304 @default.
• W2107455584 creator A5007198127 @default.
• W2107455584 creator A5007803402 @default.
• W2107455584 creator A5017452693 @default.
• W2107455584 creator A5028375354 @default.
• W2107455584 creator A5042672607 @default.
• W2107455584 creator A5046262462 @default.
• W2107455584 creator A5048262066 @default.
• W2107455584 creator A5056034597 @default.
• W2107455584 creator A5080078980 @default.
• W2107455584 date "2002-12-04" @default.
• W2107455584 modified "2023-09-27" @default.
• W2107455584 title "Advances in production methods in VLSI and ULSI technology using isolated-chamber sputter deposition of Al 1% Si films" @default.
• W2107455584 cites W2038994742 @default.
• W2107455584 doi "https://doi.org/10.1109/vmic.1990.127886" @default.
• W2107455584 hasPublicationYear "2002" @default.
• W2107455584 type Work @default.
• W2107455584 sameAs 2107455584 @default.
• W2107455584 citedByCount "0" @default.
• W2107455584 crossrefType "proceedings-article" @default.
• W2107455584 hasAuthorship W2107455584A5004387373 @default.
• W2107455584 hasAuthorship W2107455584A5004810304 @default.
• W2107455584 hasAuthorship W2107455584A5007198127 @default.
• W2107455584 hasAuthorship W2107455584A5007803402 @default.
• W2107455584 hasAuthorship W2107455584A5017452693 @default.
• W2107455584 hasAuthorship W2107455584A5028375354 @default.
• W2107455584 hasAuthorship W2107455584A5042672607 @default.
• W2107455584 hasAuthorship W2107455584A5046262462 @default.
• W2107455584 hasAuthorship W2107455584A5048262066 @default.
• W2107455584 hasAuthorship W2107455584A5056034597 @default.
• W2107455584 hasAuthorship W2107455584A5080078980 @default.
• W2107455584 hasConcept C100460472 @default.
• W2107455584 hasConcept C111919701 @default.
• W2107455584 hasConcept C127413603 @default.
• W2107455584 hasConcept C14580979 @default.
• W2107455584 hasConcept C151730666 @default.
• W2107455584 hasConcept C160671074 @default.
• W2107455584 hasConcept C171250308 @default.
• W2107455584 hasConcept C19067145 @default.
• W2107455584 hasConcept C192562407 @default.
• W2107455584 hasConcept C21880701 @default.
• W2107455584 hasConcept C22423302 @default.
• W2107455584 hasConcept C24326235 @default.
• W2107455584 hasConcept C2779227376 @default.
• W2107455584 hasConcept C2816523 @default.
• W2107455584 hasConcept C41008148 @default.
• W2107455584 hasConcept C49040817 @default.
• W2107455584 hasConcept C544956773 @default.
• W2107455584 hasConcept C64297162 @default.
• W2107455584 hasConcept C86803240 @default.
• W2107455584 hasConcept C98045186 @default.
• W2107455584 hasConceptScore W2107455584C100460472 @default.
• W2107455584 hasConceptScore W2107455584C111919701 @default.
• W2107455584 hasConceptScore W2107455584C127413603 @default.
• W2107455584 hasConceptScore W2107455584C14580979 @default.
• W2107455584 hasConceptScore W2107455584C151730666 @default.
• W2107455584 hasConceptScore W2107455584C160671074 @default.
• W2107455584 hasConceptScore W2107455584C171250308 @default.
• W2107455584 hasConceptScore W2107455584C19067145 @default.
• W2107455584 hasConceptScore W2107455584C192562407 @default.
• W2107455584 hasConceptScore W2107455584C21880701 @default.
• W2107455584 hasConceptScore W2107455584C22423302 @default.
• W2107455584 hasConceptScore W2107455584C24326235 @default.
• W2107455584 hasConceptScore W2107455584C2779227376 @default.
• W2107455584 hasConceptScore W2107455584C2816523 @default.
• W2107455584 hasConceptScore W2107455584C41008148 @default.
• W2107455584 hasConceptScore W2107455584C49040817 @default.
• W2107455584 hasConceptScore W2107455584C544956773 @default.
• W2107455584 hasConceptScore W2107455584C64297162 @default.
• W2107455584 hasConceptScore W2107455584C86803240 @default.
• W2107455584 hasConceptScore W2107455584C98045186 @default.
• W2107455584 hasLocation W21074555841 @default.
• W2107455584 hasOpenAccess W2107455584 @default.
• W2107455584 hasPrimaryLocation W21074555841 @default.
• W2107455584 hasRelatedWork W1527189500 @default.
• W2107455584 hasRelatedWork W1556515285 @default.
• W2107455584 hasRelatedWork W1568474757 @default.
• W2107455584 hasRelatedWork W1823776596 @default.
• W2107455584 hasRelatedWork W1867568626 @default.
• W2107455584 hasRelatedWork W1941066137 @default.
• W2107455584 hasRelatedWork W1977862813 @default.
• W2107455584 hasRelatedWork W1982132988 @default.
• W2107455584 hasRelatedWork W2028651075 @default.
• W2107455584 hasRelatedWork W2060613134 @default.
• W2107455584 hasRelatedWork W2088192961 @default.
• W2107455584 hasRelatedWork W2113107144 @default.
• W2107455584 hasRelatedWork W2116038695 @default.
• W2107455584 hasRelatedWork W2118920489 @default.
• W2107455584 hasRelatedWork W2138384940 @default.
• W2107455584 hasRelatedWork W2170201456 @default.
• W2107455584 hasRelatedWork W2533674982 @default.
• W2107455584 hasRelatedWork W2536795714 @default.
• W2107455584 hasRelatedWork W55386148 @default.
• W2107455584 hasRelatedWork W2137978048 @default.
• W2107455584 isParatext "false" @default.
• W2107455584 isRetracted "false" @default.
• W2107455584 magId "2107455584" @default.

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