Matches in SemOpenAlex for { <https://semopenalex.org/work/W2108048737> ?p ?o ?g. }
- W2108048737 abstract "In this paper, we present the effects of the thermal annealing of the W/SiO/sub 2/ multi-layer Bragg reflectors on the resonance characteristics of the ZnO-based film bulk acoustic resonator (FBAR) devices and the use of the cobalt (Co) electrodes instead of the aluminum (Al) electrodes to optimize the FBAR for RF filter applications. The resonance characteristics could be significantly improved by the thermal annealing and using the Co as the electrodes in FBAR devices. The FBAR devices with the Bragg reflectors annealed at 400/spl deg/C/30 min show excellent resonance characteristics in term of the return loss and Q-factor." @default.
- W2108048737 created "2016-06-24" @default.
- W2108048737 creator A5002370686 @default.
- W2108048737 creator A5002496315 @default.
- W2108048737 creator A5032434090 @default.
- W2108048737 creator A5033619263 @default.
- W2108048737 creator A5068081022 @default.
- W2108048737 creator A5085660248 @default.
- W2108048737 date "2004-06-22" @default.
- W2108048737 modified "2023-09-25" @default.
- W2108048737 title "Optimization of film bulk acoustic wave resonator (FBAR) for RF filter applications" @default.
- W2108048737 cites W1653015333 @default.
- W2108048737 cites W1934334701 @default.
- W2108048737 cites W1980318265 @default.
- W2108048737 cites W2018881848 @default.
- W2108048737 cites W2078983037 @default.
- W2108048737 cites W2138925153 @default.
- W2108048737 cites W2144811296 @default.
- W2108048737 cites W3217742010 @default.
- W2108048737 cites W2107685264 @default.
- W2108048737 doi "https://doi.org/10.1109/rawcon.2003.1227974" @default.
- W2108048737 hasPublicationYear "2004" @default.
- W2108048737 type Work @default.
- W2108048737 sameAs 2108048737 @default.
- W2108048737 citedByCount "0" @default.
- W2108048737 crossrefType "proceedings-article" @default.
- W2108048737 hasAuthorship W2108048737A5002370686 @default.
- W2108048737 hasAuthorship W2108048737A5002496315 @default.
- W2108048737 hasAuthorship W2108048737A5032434090 @default.
- W2108048737 hasAuthorship W2108048737A5033619263 @default.
- W2108048737 hasAuthorship W2108048737A5068081022 @default.
- W2108048737 hasAuthorship W2108048737A5085660248 @default.
- W2108048737 hasConcept C109214941 @default.
- W2108048737 hasConcept C119599485 @default.
- W2108048737 hasConcept C121332964 @default.
- W2108048737 hasConcept C127413603 @default.
- W2108048737 hasConcept C132237922 @default.
- W2108048737 hasConcept C139210041 @default.
- W2108048737 hasConcept C147789679 @default.
- W2108048737 hasConcept C153294291 @default.
- W2108048737 hasConcept C159985019 @default.
- W2108048737 hasConcept C165801399 @default.
- W2108048737 hasConcept C17525397 @default.
- W2108048737 hasConcept C185592680 @default.
- W2108048737 hasConcept C187725362 @default.
- W2108048737 hasConcept C192562407 @default.
- W2108048737 hasConcept C196901423 @default.
- W2108048737 hasConcept C204530211 @default.
- W2108048737 hasConcept C21822782 @default.
- W2108048737 hasConcept C2777855556 @default.
- W2108048737 hasConcept C49040817 @default.
- W2108048737 hasConcept C74064498 @default.
- W2108048737 hasConcept C90327742 @default.
- W2108048737 hasConcept C97126364 @default.
- W2108048737 hasConceptScore W2108048737C109214941 @default.
- W2108048737 hasConceptScore W2108048737C119599485 @default.
- W2108048737 hasConceptScore W2108048737C121332964 @default.
- W2108048737 hasConceptScore W2108048737C127413603 @default.
- W2108048737 hasConceptScore W2108048737C132237922 @default.
- W2108048737 hasConceptScore W2108048737C139210041 @default.
- W2108048737 hasConceptScore W2108048737C147789679 @default.
- W2108048737 hasConceptScore W2108048737C153294291 @default.
- W2108048737 hasConceptScore W2108048737C159985019 @default.
- W2108048737 hasConceptScore W2108048737C165801399 @default.
- W2108048737 hasConceptScore W2108048737C17525397 @default.
- W2108048737 hasConceptScore W2108048737C185592680 @default.
- W2108048737 hasConceptScore W2108048737C187725362 @default.
- W2108048737 hasConceptScore W2108048737C192562407 @default.
- W2108048737 hasConceptScore W2108048737C196901423 @default.
- W2108048737 hasConceptScore W2108048737C204530211 @default.
- W2108048737 hasConceptScore W2108048737C21822782 @default.
- W2108048737 hasConceptScore W2108048737C2777855556 @default.
- W2108048737 hasConceptScore W2108048737C49040817 @default.
- W2108048737 hasConceptScore W2108048737C74064498 @default.
- W2108048737 hasConceptScore W2108048737C90327742 @default.
- W2108048737 hasConceptScore W2108048737C97126364 @default.
- W2108048737 hasLocation W21080487371 @default.
- W2108048737 hasOpenAccess W2108048737 @default.
- W2108048737 hasPrimaryLocation W21080487371 @default.
- W2108048737 hasRelatedWork W1523558574 @default.
- W2108048737 hasRelatedWork W1535200054 @default.
- W2108048737 hasRelatedWork W1551474150 @default.
- W2108048737 hasRelatedWork W1902665057 @default.
- W2108048737 hasRelatedWork W1979177158 @default.
- W2108048737 hasRelatedWork W1990048720 @default.
- W2108048737 hasRelatedWork W2027329394 @default.
- W2108048737 hasRelatedWork W2032692003 @default.
- W2108048737 hasRelatedWork W2034292149 @default.
- W2108048737 hasRelatedWork W2071439075 @default.
- W2108048737 hasRelatedWork W2079480490 @default.
- W2108048737 hasRelatedWork W2094831893 @default.
- W2108048737 hasRelatedWork W2124398091 @default.
- W2108048737 hasRelatedWork W2137504694 @default.
- W2108048737 hasRelatedWork W2144436304 @default.
- W2108048737 hasRelatedWork W2165251415 @default.
- W2108048737 hasRelatedWork W2390202145 @default.
- W2108048737 hasRelatedWork W2528474319 @default.
- W2108048737 hasRelatedWork W2797083621 @default.
- W2108048737 hasRelatedWork W8006026 @default.
- W2108048737 isParatext "false" @default.