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- W2108285660 abstract "The performance is reported for a new microelectromechanical structure (MEMS) cantilever microswitch. We report on both dc- and capacitively-contacted microswitches. The dc-contacted microswitches have contact resistance of less than 1 /spl Omega/, and the RF loss of the switch up to 40 GHz in the closed position is 0.1-0.2 dB. Capacitively-contacted switches have an impedance ratio of 141:1 from the open to closed state and in the closed position have a series capacitance of 1.2 pF. The capacitively-contacted switches have been measured up to 40 GHz with S/sub 22/ less than -0.7 dB across the 5-40 GHz band." @default.
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- W2108285660 date "2001-03-01" @default.
- W2108285660 modified "2023-10-16" @default.
- W2108285660 title "MEMS microswitches for reconfigurable microwave circuitry" @default.
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- W2108285660 doi "https://doi.org/10.1109/7260.915617" @default.
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