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- W2108335863 abstract "Microelectromechanical systems (MEMS) merging integrated sensors, microactuators, and low-power electronics are rapidly growing in sophistication. Projection displays, IR/thermal imagers, print heads, microphones, accelerometers and gyros are all emerging based on this technology. Using embedded microprocessors, complete microsystems employing self-testing and digital compensation promise to achieve levels of reliability and accuracy previously impossible at low cost. Sensors for advanced semiconductor process tools, modules for distributed environmental monitoring, inertial-grade navigation aids, advanced security systems, and mass storage devices are a few of the applications being targeted. The technology choices, device structures, applications, and tradeoffs in this area are examined in this paper along with future challenges." @default.
- W2108335863 created "2016-06-24" @default.
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- W2108335863 date "2002-12-24" @default.
- W2108335863 modified "2023-09-27" @default.
- W2108335863 title "Microelectromechanical systems: interfacing electronics to a non-electronic world" @default.
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- W2108335863 doi "https://doi.org/10.1109/iedm.1996.553029" @default.
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