Matches in SemOpenAlex for { <https://semopenalex.org/work/W2108443318> ?p ?o ?g. }
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- W2108443318 endingPage "134" @default.
- W2108443318 startingPage "125" @default.
- W2108443318 abstract "Particle-in-cell/Monte Carlo (PIC/MC) simulations of capacitively coupled radio-frequency (RF) glow discharges were carried out for low pressure CH/sub 4/ plasmas. The present computational scheme includes the motions and collisions of both neutral and charged particles. The CH/sub 4/ plasma is modeled by combining a one-dimensional PIC/MC method with a polyatomic particle collision scheme. The model considers the motions of CH/sub 4/, CH/sub 4//sup +/, CH/sub 3/, C/sub 2/H/sub 5/, H/sub 2/, H, and electrons. Space and time dependent results show ionization rate is high at the sheath region. The dissociation rate of CH/sub 4/ is found to be high at the sheath as well as in the plasma bulk. Deposition rate of carbon film is calculated by sampling impinging particles at at the powered electrode. The calculations show that neutral radicals are the major depositing species for the cases studied. Ion energy impinging to the electrode was found to be strongly dependent on the imposed dc bias (as opposed to self-bias) voltage for a given RF voltage. Deposition rate was found to be almost independent of the imposed dc bias voltage as the RF voltage remained constant." @default.
- W2108443318 created "2016-06-24" @default.
- W2108443318 creator A5005581153 @default.
- W2108443318 creator A5008982261 @default.
- W2108443318 creator A5015147604 @default.
- W2108443318 date "1998-04-01" @default.
- W2108443318 modified "2023-10-16" @default.
- W2108443318 title "Particle simulation of radio-frequency plasma discharges of methane for carbon film deposition" @default.
- W2108443318 cites W1971422279 @default.
- W2108443318 cites W1989438815 @default.
- W2108443318 cites W2000560073 @default.
- W2108443318 cites W2032633290 @default.
- W2108443318 cites W2050674662 @default.
- W2108443318 cites W2067979108 @default.
- W2108443318 cites W2070048544 @default.
- W2108443318 cites W2075388986 @default.
- W2108443318 cites W2085947727 @default.
- W2108443318 cites W2091378118 @default.
- W2108443318 cites W2117482563 @default.
- W2108443318 cites W2122374175 @default.
- W2108443318 cites W2122540346 @default.
- W2108443318 cites W2123466980 @default.
- W2108443318 cites W2141258567 @default.
- W2108443318 cites W2157188779 @default.
- W2108443318 cites W2165215367 @default.
- W2108443318 cites W4229961727 @default.
- W2108443318 doi "https://doi.org/10.1109/27.669604" @default.
- W2108443318 hasPublicationYear "1998" @default.
- W2108443318 type Work @default.
- W2108443318 sameAs 2108443318 @default.
- W2108443318 citedByCount "30" @default.
- W2108443318 countsByYear W21084433182012 @default.
- W2108443318 countsByYear W21084433182013 @default.
- W2108443318 countsByYear W21084433182018 @default.
- W2108443318 countsByYear W21084433182019 @default.
- W2108443318 crossrefType "journal-article" @default.
- W2108443318 hasAuthorship W2108443318A5005581153 @default.
- W2108443318 hasAuthorship W2108443318A5008982261 @default.
- W2108443318 hasAuthorship W2108443318A5015147604 @default.
- W2108443318 hasConcept C113196181 @default.
- W2108443318 hasConcept C119599485 @default.
- W2108443318 hasConcept C121332964 @default.
- W2108443318 hasConcept C127413603 @default.
- W2108443318 hasConcept C145148216 @default.
- W2108443318 hasConcept C165801399 @default.
- W2108443318 hasConcept C17525397 @default.
- W2108443318 hasConcept C184779094 @default.
- W2108443318 hasConcept C185592680 @default.
- W2108443318 hasConcept C192562407 @default.
- W2108443318 hasConcept C198291218 @default.
- W2108443318 hasConcept C20254490 @default.
- W2108443318 hasConcept C43617362 @default.
- W2108443318 hasConcept C62520636 @default.
- W2108443318 hasConcept C74064498 @default.
- W2108443318 hasConcept C82706917 @default.
- W2108443318 hasConceptScore W2108443318C113196181 @default.
- W2108443318 hasConceptScore W2108443318C119599485 @default.
- W2108443318 hasConceptScore W2108443318C121332964 @default.
- W2108443318 hasConceptScore W2108443318C127413603 @default.
- W2108443318 hasConceptScore W2108443318C145148216 @default.
- W2108443318 hasConceptScore W2108443318C165801399 @default.
- W2108443318 hasConceptScore W2108443318C17525397 @default.
- W2108443318 hasConceptScore W2108443318C184779094 @default.
- W2108443318 hasConceptScore W2108443318C185592680 @default.
- W2108443318 hasConceptScore W2108443318C192562407 @default.
- W2108443318 hasConceptScore W2108443318C198291218 @default.
- W2108443318 hasConceptScore W2108443318C20254490 @default.
- W2108443318 hasConceptScore W2108443318C43617362 @default.
- W2108443318 hasConceptScore W2108443318C62520636 @default.
- W2108443318 hasConceptScore W2108443318C74064498 @default.
- W2108443318 hasConceptScore W2108443318C82706917 @default.
- W2108443318 hasIssue "2" @default.
- W2108443318 hasLocation W21084433181 @default.
- W2108443318 hasOpenAccess W2108443318 @default.
- W2108443318 hasPrimaryLocation W21084433181 @default.
- W2108443318 hasRelatedWork W150221835 @default.
- W2108443318 hasRelatedWork W1623576058 @default.
- W2108443318 hasRelatedWork W1968550503 @default.
- W2108443318 hasRelatedWork W2055605975 @default.
- W2108443318 hasRelatedWork W2091949762 @default.
- W2108443318 hasRelatedWork W2094183573 @default.
- W2108443318 hasRelatedWork W3040943442 @default.
- W2108443318 hasRelatedWork W4220658624 @default.
- W2108443318 hasRelatedWork W4362663149 @default.
- W2108443318 hasRelatedWork W2083108293 @default.
- W2108443318 hasVolume "26" @default.
- W2108443318 isParatext "false" @default.
- W2108443318 isRetracted "false" @default.
- W2108443318 magId "2108443318" @default.
- W2108443318 workType "article" @default.