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- W2108585857 endingPage "055024" @default.
- W2108585857 startingPage "055024" @default.
- W2108585857 abstract "When it comes to high-performance filtration, separation, sunlight collection, surface charge storage or catalysis, the effective surface area is what counts. Highly regular fractal structures seem to be the perfect candidates, but manufacturing can be quite cumbersome. Here it is shown-–for the first time—that complex 3D fractals can be engineered using a recursive operation in conventional micromachining of single crystalline silicon. The procedure uses the built-in capability of the crystal lattice to form self-similar octahedral structures with minimal interference of the constructor. The silicon fractal can be used directly or as a mold to transfer the shape into another material. Moreover, they can be dense, porous, or like a wireframe. We demonstrate, after four levels of processing, that the initial number of octahedral structures is increased by a factor of 625. Meanwhile the size decreases 16 times down to 300 nm. At any level, pores of less than 100 nm can be fabricated at the octahedral vertices of the fractal. The presented technique supports the design of fractals with Hausdorff dimension D free of choice and up to D = 2.322." @default.
- W2108585857 created "2016-06-24" @default.
- W2108585857 creator A5006143543 @default.
- W2108585857 creator A5037228905 @default.
- W2108585857 creator A5039709252 @default.
- W2108585857 date "2013-04-18" @default.
- W2108585857 modified "2023-09-30" @default.
- W2108585857 title "Fabrication of 3D fractal structures using nanoscale anisotropic etching of single crystalline silicon" @default.
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- W2108585857 cites W1963566757 @default.
- W2108585857 cites W1963630012 @default.
- W2108585857 cites W1964091222 @default.
- W2108585857 cites W1966043962 @default.
- W2108585857 cites W1967953371 @default.
- W2108585857 cites W1969324628 @default.
- W2108585857 cites W1973810636 @default.
- W2108585857 cites W1977525095 @default.
- W2108585857 cites W1979430503 @default.
- W2108585857 cites W1984606415 @default.
- W2108585857 cites W1990610847 @default.
- W2108585857 cites W1996113105 @default.
- W2108585857 cites W1997385990 @default.
- W2108585857 cites W2000440643 @default.
- W2108585857 cites W2000902397 @default.
- W2108585857 cites W2002052849 @default.
- W2108585857 cites W2002478524 @default.
- W2108585857 cites W2003079999 @default.
- W2108585857 cites W2011480164 @default.
- W2108585857 cites W2011503417 @default.
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- W2108585857 cites W2015018275 @default.
- W2108585857 cites W2015927413 @default.
- W2108585857 cites W2022967585 @default.
- W2108585857 cites W2024216899 @default.
- W2108585857 cites W2026235582 @default.
- W2108585857 cites W2026861087 @default.
- W2108585857 cites W2027561985 @default.
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- W2108585857 cites W2033750748 @default.
- W2108585857 cites W2034864625 @default.
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- W2108585857 cites W2055790070 @default.
- W2108585857 cites W2056986895 @default.
- W2108585857 cites W2057788561 @default.
- W2108585857 cites W2068681508 @default.
- W2108585857 cites W2071862938 @default.
- W2108585857 cites W2073443556 @default.
- W2108585857 cites W2078595286 @default.
- W2108585857 cites W2078815478 @default.
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- W2108585857 cites W2097972359 @default.
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- W2108585857 cites W2099681111 @default.
- W2108585857 cites W2105772077 @default.
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- W2108585857 cites W2130485214 @default.
- W2108585857 cites W2130838094 @default.
- W2108585857 cites W2135128138 @default.
- W2108585857 cites W2136428595 @default.
- W2108585857 cites W2137983525 @default.
- W2108585857 cites W2138085462 @default.
- W2108585857 cites W2142158448 @default.
- W2108585857 cites W2143739958 @default.
- W2108585857 cites W2146413151 @default.
- W2108585857 cites W2149961130 @default.
- W2108585857 cites W2157503452 @default.
- W2108585857 cites W2162906603 @default.
- W2108585857 cites W2162930691 @default.
- W2108585857 cites W2163793133 @default.
- W2108585857 cites W2168600815 @default.
- W2108585857 cites W2171192210 @default.
- W2108585857 cites W2402048615 @default.
- W2108585857 cites W3190734799 @default.
- W2108585857 cites W4230231993 @default.
- W2108585857 cites W4256495756 @default.
- W2108585857 cites W4294183471 @default.
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- W2108585857 doi "https://doi.org/10.1088/0960-1317/23/5/055024" @default.
- W2108585857 hasPublicationYear "2013" @default.
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