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- W2108617587 abstract "This research developed two types of multi-probe cantilever arrays for the parallel scanning probe microscope (SPM) based nanolithography (SPNL) with high rates of throughput. The multi-probe cantilever arrays have been fabricated by an anisotropic wet etching process. All probes have a sharp tip of a quasi-trihedral pyramidal shape composed of two (311) and [411] planes. Consequently, we have succeeded in fabrication of parallel nanometric wires and grooves on single crystal silicon (SCS) wafer using negative and positive type of SPNL techniques, respectively. Furthermore, a free suspended silicon nanowire used as a high frequency resonator was developed by the positive SPNL." @default.
- W2108617587 created "2016-06-24" @default.
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- W2108617587 date "2005-08-24" @default.
- W2108617587 modified "2023-09-26" @default.
- W2108617587 title "Scanning probe parallel nanolithography using multi-probes cantilever array for silicon nanodevices" @default.
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- W2108617587 doi "https://doi.org/10.1109/sensor.2005.1496384" @default.
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