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• W2108659321 abstract "Abstract In this paper, we suggest the spacer formation method in the field emission display (FED) using glass‐to‐glass anodic bonding, which has been well known in the area of vacuum sealing and mounting of micro devices. It can offer very clean process without generating gases during vacuum sealing. This aligning and mounting method of high aspect ratio spacers can be a prospective technique having advantages of easy alignment, high strength, and short process time. We have designed the bonding tool that is capable of aligning and bonding of spacers. The diode‐type FED panel with spacer of 80 width was successfully fabricated and operated at 1000 V DC." @default.
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• W2108659321 date "2000-05-01" @default.
• W2108659321 modified "2023-09-28" @default.
• W2108659321 title "P‐20: Development of Spacer Formation Method Using Anodic Bonding Technique for Field Emission Display" @default.
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• W2108659321 doi "https://doi.org/10.1889/1.1833017" @default.
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