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- W2108664265 abstract "We report micro-electro-mechanical systems (MEMS) chemical sensors with improved on-chip optical interrogation method. A silicon-on-insulator (SOI) MEMS resonator is coupled to a waveguide Fabry-Perot microcavity enabling high resolution displacement and mechanical resonance measurement. By coating the MEMS resonator with a chemo-selective polymer, exposure to chemical analytes results in beam bending (static mode) as well as mass loading and a mechanical resonant frequency shift (dynamic mode). Proof-of-concept relative humidity sensing is demonstrated. Integrated waveguide power splitters/combiners are investigated for interconnecting many sensors on a chip." @default.
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- W2108664265 date "2009-06-01" @default.
- W2108664265 modified "2023-09-26" @default.
- W2108664265 title "Integrated photonic MEMS chemical sensors" @default.
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- W2108664265 doi "https://doi.org/10.1109/sensor.2009.5285459" @default.
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