Matches in SemOpenAlex for { <https://semopenalex.org/work/W2108679314> ?p ?o ?g. }
- W2108679314 abstract "Car-Parrinello simulations and static density-functional theory calculations reveal how hydrogen promotes growth of epitaxial, ordered Si films in plasma-enhanced chemical vapor deposition at low-temperature conditions where the exposed $mathrm{Si}(001)mathrm{text{ensuremath{-}}}(2ifmmodetimeselsetexttimesfi{}1)$ surface is fully hydrogenated. Thermal H atoms, indeed, are shown to selectively etch adsorbed silyl back to the gas phase or to form adsorbed species which can be easily incorporated into the crystal down to $Tensuremath{sim}200text{ }ifmmode^circelsetextdegreefi{}mathrm{C}$ and start diffusing around $Tensuremath{sim}300text{ }ifmmode^circelsetextdegreefi{}mathrm{C}$. Our results are well consistent with earlier experiments." @default.
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- W2108679314 date "2008-02-01" @default.
- W2108679314 modified "2023-09-26" @default.
- W2108679314 title "Thermal-Hydrogen Promoted Selective Desorption and Enhanced Mobility of Adsorbed Radicals in Silicon Film Growth" @default.
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- W2108679314 doi "https://doi.org/10.1103/physrevlett.100.046105" @default.
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