Matches in SemOpenAlex for { <https://semopenalex.org/work/W2108703572> ?p ?o ?g. }
- W2108703572 endingPage "5613" @default.
- W2108703572 startingPage "5604" @default.
- W2108703572 abstract "An analytical solution for the sheath dynamics of an asymmetrically driven capacitively coupled plasma is obtained under the assumptions of time-independent, collisionless ion motion, inertialess electrons, and uniform current density. Modeling is performed considering that the plasma is driven by a nonsinusoidal radio frequency (rf) current which can be resolved into a finite number of harmonic components. Together with different sheath parameters the equation for the bulk plasma impedance is also obtained to calculate the overall plasma impedance and the overall rf voltage. Assuming equal plate areas the solution for a symmetric discharge is also obtainable from this model. We have found that the even harmonic components of rf voltage and impedance are always present, even in a symmetric discharge. Experimental results are shown to be in qualitative agreement with the theoretical model. The values of normalized rf voltage and impedance harmonics assume lower values as the asymmetry of the plasma chamber decreases." @default.
- W2108703572 created "2016-06-24" @default.
- W2108703572 creator A5019495920 @default.
- W2108703572 creator A5022307970 @default.
- W2108703572 creator A5034314875 @default.
- W2108703572 date "2002-04-17" @default.
- W2108703572 modified "2023-10-17" @default.
- W2108703572 title "Plasma modeling for a nonsymmetric capacitive discharge driven by a nonsinusoidal radio frequency current" @default.
- W2108703572 cites W1978578341 @default.
- W2108703572 cites W1983458011 @default.
- W2108703572 cites W1990299123 @default.
- W2108703572 cites W1993361798 @default.
- W2108703572 cites W1995430906 @default.
- W2108703572 cites W2040443190 @default.
- W2108703572 cites W2047966721 @default.
- W2108703572 cites W2054156844 @default.
- W2108703572 cites W2054836295 @default.
- W2108703572 cites W2060853353 @default.
- W2108703572 cites W2080532500 @default.
- W2108703572 cites W2087171002 @default.
- W2108703572 cites W2088351680 @default.
- W2108703572 cites W2103850228 @default.
- W2108703572 cites W2107665776 @default.
- W2108703572 cites W2112838458 @default.
- W2108703572 cites W2124381594 @default.
- W2108703572 cites W4235326677 @default.
- W2108703572 doi "https://doi.org/10.1063/1.1462425" @default.
- W2108703572 hasPublicationYear "2002" @default.
- W2108703572 type Work @default.
- W2108703572 sameAs 2108703572 @default.
- W2108703572 citedByCount "10" @default.
- W2108703572 countsByYear W21087035722012 @default.
- W2108703572 countsByYear W21087035722014 @default.
- W2108703572 countsByYear W21087035722015 @default.
- W2108703572 countsByYear W21087035722020 @default.
- W2108703572 countsByYear W21087035722021 @default.
- W2108703572 countsByYear W21087035722022 @default.
- W2108703572 countsByYear W21087035722023 @default.
- W2108703572 crossrefType "journal-article" @default.
- W2108703572 hasAuthorship W2108703572A5019495920 @default.
- W2108703572 hasAuthorship W2108703572A5022307970 @default.
- W2108703572 hasAuthorship W2108703572A5034314875 @default.
- W2108703572 hasBestOaLocation W21087035722 @default.
- W2108703572 hasConcept C119599485 @default.
- W2108703572 hasConcept C121332964 @default.
- W2108703572 hasConcept C127413603 @default.
- W2108703572 hasConcept C127934551 @default.
- W2108703572 hasConcept C165801399 @default.
- W2108703572 hasConcept C17829176 @default.
- W2108703572 hasConcept C184779094 @default.
- W2108703572 hasConcept C185592680 @default.
- W2108703572 hasConcept C188414643 @default.
- W2108703572 hasConcept C192562407 @default.
- W2108703572 hasConcept C206755178 @default.
- W2108703572 hasConcept C24890656 @default.
- W2108703572 hasConcept C30475298 @default.
- W2108703572 hasConcept C62520636 @default.
- W2108703572 hasConcept C68687820 @default.
- W2108703572 hasConcept C74064498 @default.
- W2108703572 hasConcept C82706917 @default.
- W2108703572 hasConcept C95974651 @default.
- W2108703572 hasConceptScore W2108703572C119599485 @default.
- W2108703572 hasConceptScore W2108703572C121332964 @default.
- W2108703572 hasConceptScore W2108703572C127413603 @default.
- W2108703572 hasConceptScore W2108703572C127934551 @default.
- W2108703572 hasConceptScore W2108703572C165801399 @default.
- W2108703572 hasConceptScore W2108703572C17829176 @default.
- W2108703572 hasConceptScore W2108703572C184779094 @default.
- W2108703572 hasConceptScore W2108703572C185592680 @default.
- W2108703572 hasConceptScore W2108703572C188414643 @default.
- W2108703572 hasConceptScore W2108703572C192562407 @default.
- W2108703572 hasConceptScore W2108703572C206755178 @default.
- W2108703572 hasConceptScore W2108703572C24890656 @default.
- W2108703572 hasConceptScore W2108703572C30475298 @default.
- W2108703572 hasConceptScore W2108703572C62520636 @default.
- W2108703572 hasConceptScore W2108703572C68687820 @default.
- W2108703572 hasConceptScore W2108703572C74064498 @default.
- W2108703572 hasConceptScore W2108703572C82706917 @default.
- W2108703572 hasConceptScore W2108703572C95974651 @default.
- W2108703572 hasIssue "9" @default.
- W2108703572 hasLocation W21087035721 @default.
- W2108703572 hasLocation W21087035722 @default.
- W2108703572 hasOpenAccess W2108703572 @default.
- W2108703572 hasPrimaryLocation W21087035721 @default.
- W2108703572 hasRelatedWork W2069507702 @default.
- W2108703572 hasRelatedWork W2076039583 @default.
- W2108703572 hasRelatedWork W2092963020 @default.
- W2108703572 hasRelatedWork W2158825583 @default.
- W2108703572 hasRelatedWork W2769101350 @default.
- W2108703572 hasRelatedWork W2809836172 @default.
- W2108703572 hasRelatedWork W3189063485 @default.
- W2108703572 hasRelatedWork W4283759953 @default.
- W2108703572 hasRelatedWork W4283782981 @default.
- W2108703572 hasRelatedWork W2019437472 @default.
- W2108703572 hasVolume "91" @default.
- W2108703572 isParatext "false" @default.
- W2108703572 isRetracted "false" @default.
- W2108703572 magId "2108703572" @default.