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• W2108703654 endingPage "C237" @default.
• W2108703654 startingPage "C237" @default.
• W2108703654 abstract "CVD Cu films deposited on TaN substrates with and without an Ar plasma treatment prior to Cu film deposition and the effects of postdeposition thermal annealing were investigated. Cu films deposited on an Ar-plasma-treated TaN substrate have a number of favorable properties over the films deposited on a TaN substrate without the plasma treatment. These include a smoother film surface, regular arrangement of Cu grains, and increased (111)-preferred orientation. The postdeposition thermal annealing enhanced the (111)-preferred orientation and decreased the resistivity of the as-deposited Cu films. As the results of Ar plasma substrate pretreatment, we presume that the smoother and amorphous-like surface layer of the TaN substrate enhanced the formation of the most stable (111) texture Cu films, and that the higher substrate surface energy resulted in Cu films with smoother surface and regularly shaped smaller grains. Thus, a combined process including Ar plasma substrate treatment prior to Cu film deposition and postdeposition thermal annealing at an appropriate temperature in ambient is proposed for the advantages of low-resistivity and high (111)-oriented Cu film deposition. © 2002 The Electrochemical Society. All rights reserved." @default.
• W2108703654 created "2016-06-24" @default.
• W2108703654 creator A5035606497 @default.
• W2108703654 creator A5048600766 @default.
• W2108703654 creator A5079297921 @default.
• W2108703654 date "2002-01-01" @default.
• W2108703654 modified "2023-10-18" @default.
• W2108703654 title "Effects of TaN Substrate Pretreatment by Ar Plasma on Copper Chemical Vapor Deposition" @default.
• W2108703654 cites W1598672916 @default.
• W2108703654 cites W1968303043 @default.
• W2108703654 cites W1970679770 @default.
• W2108703654 cites W1984752931 @default.
• W2108703654 cites W1985193578 @default.
• W2108703654 cites W1987761476 @default.
• W2108703654 cites W1995608017 @default.
• W2108703654 cites W1999518923 @default.
• W2108703654 cites W2007966173 @default.
• W2108703654 cites W2009459864 @default.
• W2108703654 cites W2010530819 @default.
• W2108703654 cites W2024984780 @default.
• W2108703654 cites W2047020565 @default.
• W2108703654 cites W2049369022 @default.
• W2108703654 cites W2050070504 @default.
• W2108703654 cites W2059977982 @default.
• W2108703654 cites W2060284346 @default.
• W2108703654 cites W2077770471 @default.
• W2108703654 cites W2086143050 @default.
• W2108703654 cites W2095078927 @default.
• W2108703654 cites W2099172901 @default.
• W2108703654 cites W2121771181 @default.
• W2108703654 cites W2141701919 @default.
• W2108703654 cites W2143325090 @default.
• W2108703654 cites W2149207622 @default.
• W2108703654 cites W2317621288 @default.
• W2108703654 doi "https://doi.org/10.1149/1.1462794" @default.
• W2108703654 hasPublicationYear "2002" @default.
• W2108703654 type Work @default.
• W2108703654 sameAs 2108703654 @default.
• W2108703654 citedByCount "5" @default.
• W2108703654 countsByYear W21087036542012 @default.
• W2108703654 countsByYear W21087036542022 @default.
• W2108703654 crossrefType "journal-article" @default.
• W2108703654 hasAuthorship W2108703654A5035606497 @default.
• W2108703654 hasAuthorship W2108703654A5048600766 @default.
• W2108703654 hasAuthorship W2108703654A5079297921 @default.
• W2108703654 hasConcept C111368507 @default.
• W2108703654 hasConcept C113196181 @default.
• W2108703654 hasConcept C119599485 @default.
• W2108703654 hasConcept C121332964 @default.
• W2108703654 hasConcept C127313418 @default.
• W2108703654 hasConcept C127413603 @default.
• W2108703654 hasConcept C151730666 @default.
• W2108703654 hasConcept C171250308 @default.
• W2108703654 hasConcept C185592680 @default.
• W2108703654 hasConcept C19067145 @default.
• W2108703654 hasConcept C191897082 @default.
• W2108703654 hasConcept C192562407 @default.
• W2108703654 hasConcept C2777289219 @default.
• W2108703654 hasConcept C2777855556 @default.
• W2108703654 hasConcept C2816523 @default.
• W2108703654 hasConcept C42360764 @default.
• W2108703654 hasConcept C43617362 @default.
• W2108703654 hasConcept C544778455 @default.
• W2108703654 hasConcept C56052488 @default.
• W2108703654 hasConcept C57410435 @default.
• W2108703654 hasConcept C62520636 @default.
• W2108703654 hasConcept C64297162 @default.
• W2108703654 hasConcept C69990965 @default.
• W2108703654 hasConcept C8010536 @default.
• W2108703654 hasConcept C82706917 @default.
• W2108703654 hasConcept C86803240 @default.
• W2108703654 hasConceptScore W2108703654C111368507 @default.
• W2108703654 hasConceptScore W2108703654C113196181 @default.
• W2108703654 hasConceptScore W2108703654C119599485 @default.
• W2108703654 hasConceptScore W2108703654C121332964 @default.
• W2108703654 hasConceptScore W2108703654C127313418 @default.
• W2108703654 hasConceptScore W2108703654C127413603 @default.
• W2108703654 hasConceptScore W2108703654C151730666 @default.
• W2108703654 hasConceptScore W2108703654C171250308 @default.
• W2108703654 hasConceptScore W2108703654C185592680 @default.
• W2108703654 hasConceptScore W2108703654C19067145 @default.
• W2108703654 hasConceptScore W2108703654C191897082 @default.
• W2108703654 hasConceptScore W2108703654C192562407 @default.
• W2108703654 hasConceptScore W2108703654C2777289219 @default.
• W2108703654 hasConceptScore W2108703654C2777855556 @default.
• W2108703654 hasConceptScore W2108703654C2816523 @default.
• W2108703654 hasConceptScore W2108703654C42360764 @default.
• W2108703654 hasConceptScore W2108703654C43617362 @default.
• W2108703654 hasConceptScore W2108703654C544778455 @default.
• W2108703654 hasConceptScore W2108703654C56052488 @default.
• W2108703654 hasConceptScore W2108703654C57410435 @default.
• W2108703654 hasConceptScore W2108703654C62520636 @default.
• W2108703654 hasConceptScore W2108703654C64297162 @default.
• W2108703654 hasConceptScore W2108703654C69990965 @default.
• W2108703654 hasConceptScore W2108703654C8010536 @default.
• W2108703654 hasConceptScore W2108703654C82706917 @default.
• W2108703654 hasConceptScore W2108703654C86803240 @default.
• W2108703654 hasIssue "5" @default.

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