Matches in SemOpenAlex for { <https://semopenalex.org/work/W2108782500> ?p ?o ?g. }
Showing items 1 to 95 of
95
with 100 items per page.
- W2108782500 endingPage "15066" @default.
- W2108782500 startingPage "15066" @default.
- W2108782500 abstract "Optical proximity correction (OPC) and phase shifting masks (PSM) are resolution enhancement techniques (RET) used extensively in the semiconductor industry to improve the resolution and pattern fidelity of optical lithography. In this paper, we develop generalized gradient-based RET optimization methods to solve for the inverse lithography problem, where the search space is not constrained to a finite phase tessellation but where arbitrary search trajectories in the complex space are allowed. Subsequent mask quantization leads to efficient design of PSMs having an arbitrary number of discrete phases. In order to influence the solution patterns to have more desirable manufacturability properties, a wavelet regularization framework is introduced offering more localized flexibility than total-variation regularization methods traditionally employed in inverse problems. The proposed algorithms provide highly effective four-phase PSMs capable of generating mask patterns with arbitrary Manhattan geometries. Furthermore, a double-exposure optimization method for general inverse lithography is developed where each exposure uses an optimized two-phase mask." @default.
- W2108782500 created "2016-06-24" @default.
- W2108782500 creator A5005357824 @default.
- W2108782500 creator A5031836304 @default.
- W2108782500 date "2007-01-01" @default.
- W2108782500 modified "2023-09-25" @default.
- W2108782500 title "Generalized inverse lithography methods for phase-shifting mask design" @default.
- W2108782500 doi "https://doi.org/10.1364/oe.15.015066" @default.
- W2108782500 hasPubMedId "https://pubmed.ncbi.nlm.nih.gov/19550790" @default.
- W2108782500 hasPublicationYear "2007" @default.
- W2108782500 type Work @default.
- W2108782500 sameAs 2108782500 @default.
- W2108782500 citedByCount "60" @default.
- W2108782500 countsByYear W21087825002012 @default.
- W2108782500 countsByYear W21087825002013 @default.
- W2108782500 countsByYear W21087825002014 @default.
- W2108782500 countsByYear W21087825002015 @default.
- W2108782500 countsByYear W21087825002016 @default.
- W2108782500 countsByYear W21087825002017 @default.
- W2108782500 countsByYear W21087825002018 @default.
- W2108782500 countsByYear W21087825002019 @default.
- W2108782500 countsByYear W21087825002020 @default.
- W2108782500 countsByYear W21087825002021 @default.
- W2108782500 countsByYear W21087825002022 @default.
- W2108782500 countsByYear W21087825002023 @default.
- W2108782500 crossrefType "journal-article" @default.
- W2108782500 hasAuthorship W2108782500A5005357824 @default.
- W2108782500 hasAuthorship W2108782500A5031836304 @default.
- W2108782500 hasBestOaLocation W21087825001 @default.
- W2108782500 hasConcept C105487726 @default.
- W2108782500 hasConcept C11413529 @default.
- W2108782500 hasConcept C120665830 @default.
- W2108782500 hasConcept C121332964 @default.
- W2108782500 hasConcept C127413603 @default.
- W2108782500 hasConcept C134306372 @default.
- W2108782500 hasConcept C135252773 @default.
- W2108782500 hasConcept C171250308 @default.
- W2108782500 hasConcept C177409738 @default.
- W2108782500 hasConcept C182873914 @default.
- W2108782500 hasConcept C192562407 @default.
- W2108782500 hasConcept C204223013 @default.
- W2108782500 hasConcept C207467116 @default.
- W2108782500 hasConcept C2524010 @default.
- W2108782500 hasConcept C2779227376 @default.
- W2108782500 hasConcept C28855332 @default.
- W2108782500 hasConcept C33923547 @default.
- W2108782500 hasConcept C41008148 @default.
- W2108782500 hasConcept C53524968 @default.
- W2108782500 hasConcept C62064638 @default.
- W2108782500 hasConcept C78371743 @default.
- W2108782500 hasConcept C78519656 @default.
- W2108782500 hasConceptScore W2108782500C105487726 @default.
- W2108782500 hasConceptScore W2108782500C11413529 @default.
- W2108782500 hasConceptScore W2108782500C120665830 @default.
- W2108782500 hasConceptScore W2108782500C121332964 @default.
- W2108782500 hasConceptScore W2108782500C127413603 @default.
- W2108782500 hasConceptScore W2108782500C134306372 @default.
- W2108782500 hasConceptScore W2108782500C135252773 @default.
- W2108782500 hasConceptScore W2108782500C171250308 @default.
- W2108782500 hasConceptScore W2108782500C177409738 @default.
- W2108782500 hasConceptScore W2108782500C182873914 @default.
- W2108782500 hasConceptScore W2108782500C192562407 @default.
- W2108782500 hasConceptScore W2108782500C204223013 @default.
- W2108782500 hasConceptScore W2108782500C207467116 @default.
- W2108782500 hasConceptScore W2108782500C2524010 @default.
- W2108782500 hasConceptScore W2108782500C2779227376 @default.
- W2108782500 hasConceptScore W2108782500C28855332 @default.
- W2108782500 hasConceptScore W2108782500C33923547 @default.
- W2108782500 hasConceptScore W2108782500C41008148 @default.
- W2108782500 hasConceptScore W2108782500C53524968 @default.
- W2108782500 hasConceptScore W2108782500C62064638 @default.
- W2108782500 hasConceptScore W2108782500C78371743 @default.
- W2108782500 hasConceptScore W2108782500C78519656 @default.
- W2108782500 hasIssue "23" @default.
- W2108782500 hasLocation W21087825001 @default.
- W2108782500 hasLocation W21087825002 @default.
- W2108782500 hasOpenAccess W2108782500 @default.
- W2108782500 hasPrimaryLocation W21087825001 @default.
- W2108782500 hasRelatedWork W1969331122 @default.
- W2108782500 hasRelatedWork W1981657736 @default.
- W2108782500 hasRelatedWork W2018334304 @default.
- W2108782500 hasRelatedWork W2050580654 @default.
- W2108782500 hasRelatedWork W2085515053 @default.
- W2108782500 hasRelatedWork W2108782500 @default.
- W2108782500 hasRelatedWork W2131639123 @default.
- W2108782500 hasRelatedWork W2157748877 @default.
- W2108782500 hasRelatedWork W2011952937 @default.
- W2108782500 hasRelatedWork W2090699846 @default.
- W2108782500 hasVolume "15" @default.
- W2108782500 isParatext "false" @default.
- W2108782500 isRetracted "false" @default.
- W2108782500 magId "2108782500" @default.
- W2108782500 workType "article" @default.