Matches in SemOpenAlex for { <https://semopenalex.org/work/W2109021282> ?p ?o ?g. }
Showing items 1 to 89 of
89
with 100 items per page.
- W2109021282 abstract "In this letter, the authors study the importance of a low temperature anneal in the removal of crystalline defects resulting from pulsed laser annealing of preamorphized ultrashallow p+∕n junction. Using an additional low thermal budget rapid thermal annealing at 600°C for 60s, suppression of junction leakage current of two orders in a single-pulse laser annealing and one order in a ten-pulse laser annealing is achieved through a reduction of the residual crystalline defects that could not be annihilated by laser annealing. p-channel metal-oxide-semiconductor field effect transistors with good electrical characteristics can be obtained using pulsed laser annealing followed by a low thermal budget rapid thermal annealing." @default.
- W2109021282 created "2016-06-24" @default.
- W2109021282 creator A5026382680 @default.
- W2109021282 creator A5029387870 @default.
- W2109021282 creator A5034793030 @default.
- W2109021282 creator A5038868484 @default.
- W2109021282 creator A5039263627 @default.
- W2109021282 creator A5079813961 @default.
- W2109021282 creator A5079979098 @default.
- W2109021282 creator A5091135164 @default.
- W2109021282 date "2006-09-18" @default.
- W2109021282 modified "2023-10-14" @default.
- W2109021282 title "Role of low temperature rapid thermal annealing in post-laser-annealed p-channel metal-oxide-semiconductor field effect transistor" @default.
- W2109021282 cites W1972322941 @default.
- W2109021282 cites W1973858340 @default.
- W2109021282 cites W2039188817 @default.
- W2109021282 cites W2043536195 @default.
- W2109021282 cites W2044732959 @default.
- W2109021282 cites W2058515175 @default.
- W2109021282 cites W2074469477 @default.
- W2109021282 cites W2078004049 @default.
- W2109021282 cites W2085226861 @default.
- W2109021282 cites W2134054452 @default.
- W2109021282 cites W2142638162 @default.
- W2109021282 cites W2168381288 @default.
- W2109021282 doi "https://doi.org/10.1063/1.2354446" @default.
- W2109021282 hasPublicationYear "2006" @default.
- W2109021282 type Work @default.
- W2109021282 sameAs 2109021282 @default.
- W2109021282 citedByCount "4" @default.
- W2109021282 countsByYear W21090212822014 @default.
- W2109021282 crossrefType "journal-article" @default.
- W2109021282 hasAuthorship W2109021282A5026382680 @default.
- W2109021282 hasAuthorship W2109021282A5029387870 @default.
- W2109021282 hasAuthorship W2109021282A5034793030 @default.
- W2109021282 hasAuthorship W2109021282A5038868484 @default.
- W2109021282 hasAuthorship W2109021282A5039263627 @default.
- W2109021282 hasAuthorship W2109021282A5079813961 @default.
- W2109021282 hasAuthorship W2109021282A5079979098 @default.
- W2109021282 hasAuthorship W2109021282A5091135164 @default.
- W2109021282 hasBestOaLocation W21090212822 @default.
- W2109021282 hasConcept C108225325 @default.
- W2109021282 hasConcept C119599485 @default.
- W2109021282 hasConcept C120665830 @default.
- W2109021282 hasConcept C121332964 @default.
- W2109021282 hasConcept C127413603 @default.
- W2109021282 hasConcept C145598152 @default.
- W2109021282 hasConcept C165801399 @default.
- W2109021282 hasConcept C172385210 @default.
- W2109021282 hasConcept C191897082 @default.
- W2109021282 hasConcept C192562407 @default.
- W2109021282 hasConcept C2777855556 @default.
- W2109021282 hasConcept C2779851234 @default.
- W2109021282 hasConcept C49040817 @default.
- W2109021282 hasConcept C520434653 @default.
- W2109021282 hasConceptScore W2109021282C108225325 @default.
- W2109021282 hasConceptScore W2109021282C119599485 @default.
- W2109021282 hasConceptScore W2109021282C120665830 @default.
- W2109021282 hasConceptScore W2109021282C121332964 @default.
- W2109021282 hasConceptScore W2109021282C127413603 @default.
- W2109021282 hasConceptScore W2109021282C145598152 @default.
- W2109021282 hasConceptScore W2109021282C165801399 @default.
- W2109021282 hasConceptScore W2109021282C172385210 @default.
- W2109021282 hasConceptScore W2109021282C191897082 @default.
- W2109021282 hasConceptScore W2109021282C192562407 @default.
- W2109021282 hasConceptScore W2109021282C2777855556 @default.
- W2109021282 hasConceptScore W2109021282C2779851234 @default.
- W2109021282 hasConceptScore W2109021282C49040817 @default.
- W2109021282 hasConceptScore W2109021282C520434653 @default.
- W2109021282 hasIssue "12" @default.
- W2109021282 hasLocation W21090212821 @default.
- W2109021282 hasLocation W21090212822 @default.
- W2109021282 hasOpenAccess W2109021282 @default.
- W2109021282 hasPrimaryLocation W21090212821 @default.
- W2109021282 hasRelatedWork W1984616047 @default.
- W2109021282 hasRelatedWork W2028396569 @default.
- W2109021282 hasRelatedWork W2031776232 @default.
- W2109021282 hasRelatedWork W2062132264 @default.
- W2109021282 hasRelatedWork W2080543168 @default.
- W2109021282 hasRelatedWork W2083125414 @default.
- W2109021282 hasRelatedWork W2777792417 @default.
- W2109021282 hasRelatedWork W2945504227 @default.
- W2109021282 hasRelatedWork W3036029461 @default.
- W2109021282 hasRelatedWork W3200559183 @default.
- W2109021282 hasVolume "89" @default.
- W2109021282 isParatext "false" @default.
- W2109021282 isRetracted "false" @default.
- W2109021282 magId "2109021282" @default.
- W2109021282 workType "article" @default.