FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2109028022> ?p ?o ?g. }

• W2109028022 endingPage "1750" @default.
• W2109028022 startingPage "1742" @default.
• W2109028022 abstract "Nanomanipulation in space-limited environments (e.g., inside a SEM (scanning electron microscope), and particularly in a TEM (transmission electron microscope)) requires small-sized nanomanipulators that are capable of producing sub-nanometer positioning resolutions and large output forces. This paper reports on a millimeter-sized MEMS (microelectromechanical systems) based nanomanipulator with a positioning resolution of 0.15 nm and a motion range of ± 2.55 µm. An amplification mechanism is employed to convert micrometer input displacements, generated by a conventional electrostatic comb-drive microactuator, into sub-nanometer output displacements. The device has a high load driving capability, driving a load as high as 98 µN without sacrificing positioning performance. Based on the pseudo-rigid-body approach, closed-form analytical models of the minification ratio and stiffness of the amplification mechanism are developed. Finite element simulation and testing results verify that the theoretical models are valid with an error smaller than 6.2% and that the mechanism has a high linearity (± 2.4%). The amplification mechanism and analytical models have general applicability to other MEMS transducer designs. A capacitive displacement sensor is integrated for detecting input displacements that are converted into output displacements via the minimization ratio, allowing closed-loop controlled nanomanipulation. The MEMS-based nanomanipulators are applicable to the characterization/manipulation of nanomaterials and construction of nanodevices." @default.
• W2109028022 created "2016-06-24" @default.
• W2109028022 creator A5077878309 @default.
• W2109028022 creator A5078853009 @default.
• W2109028022 creator A5080191032 @default.
• W2109028022 date "2007-08-22" @default.
• W2109028022 modified "2023-10-16" @default.
• W2109028022 title "Millimeter-sized nanomanipulator with sub-nanometer positioning resolution and large force output" @default.
• W2109028022 cites W1966368909 @default.
• W2109028022 cites W1978648449 @default.
• W2109028022 cites W1979754515 @default.
• W2109028022 cites W1986759987 @default.
• W2109028022 cites W2003469080 @default.
• W2109028022 cites W2023362441 @default.
• W2109028022 cites W2035616613 @default.
• W2109028022 cites W2036050409 @default.
• W2109028022 cites W2051080083 @default.
• W2109028022 cites W2068026719 @default.
• W2109028022 cites W2073870185 @default.
• W2109028022 cites W2102530718 @default.
• W2109028022 cites W2109348766 @default.
• W2109028022 cites W2122126133 @default.
• W2109028022 cites W2123546458 @default.
• W2109028022 cites W2135666864 @default.
• W2109028022 cites W2136217570 @default.
• W2109028022 cites W2137178805 @default.
• W2109028022 cites W2156169097 @default.
• W2109028022 cites W2162570710 @default.
• W2109028022 doi "https://doi.org/10.1088/0964-1726/16/5/029" @default.
• W2109028022 hasPublicationYear "2007" @default.
• W2109028022 type Work @default.
• W2109028022 sameAs 2109028022 @default.
• W2109028022 citedByCount "41" @default.
• W2109028022 countsByYear W21090280222012 @default.
• W2109028022 countsByYear W21090280222013 @default.
• W2109028022 countsByYear W21090280222014 @default.
• W2109028022 countsByYear W21090280222015 @default.
• W2109028022 countsByYear W21090280222016 @default.
• W2109028022 countsByYear W21090280222017 @default.
• W2109028022 countsByYear W21090280222018 @default.
• W2109028022 countsByYear W21090280222019 @default.
• W2109028022 countsByYear W21090280222021 @default.
• W2109028022 countsByYear W21090280222022 @default.
• W2109028022 countsByYear W21090280222023 @default.
• W2109028022 crossrefType "journal-article" @default.
• W2109028022 hasAuthorship W2109028022A5077878309 @default.
• W2109028022 hasAuthorship W2109028022A5078853009 @default.
• W2109028022 hasAuthorship W2109028022A5080191032 @default.
• W2109028022 hasConcept C109792285 @default.
• W2109028022 hasConcept C119599485 @default.
• W2109028022 hasConcept C120665830 @default.
• W2109028022 hasConcept C121332964 @default.
• W2109028022 hasConcept C127413603 @default.
• W2109028022 hasConcept C135628077 @default.
• W2109028022 hasConcept C159985019 @default.
• W2109028022 hasConcept C171250308 @default.
• W2109028022 hasConcept C171635847 @default.
• W2109028022 hasConcept C172707124 @default.
• W2109028022 hasConcept C192562407 @default.
• W2109028022 hasConcept C206755178 @default.
• W2109028022 hasConcept C24326235 @default.
• W2109028022 hasConcept C37977207 @default.
• W2109028022 hasConcept C58373989 @default.
• W2109028022 hasConcept C66938386 @default.
• W2109028022 hasConcept C77066764 @default.
• W2109028022 hasConcept C79772673 @default.
• W2109028022 hasConceptScore W2109028022C109792285 @default.
• W2109028022 hasConceptScore W2109028022C119599485 @default.
• W2109028022 hasConceptScore W2109028022C120665830 @default.
• W2109028022 hasConceptScore W2109028022C121332964 @default.
• W2109028022 hasConceptScore W2109028022C127413603 @default.
• W2109028022 hasConceptScore W2109028022C135628077 @default.
• W2109028022 hasConceptScore W2109028022C159985019 @default.
• W2109028022 hasConceptScore W2109028022C171250308 @default.
• W2109028022 hasConceptScore W2109028022C171635847 @default.
• W2109028022 hasConceptScore W2109028022C172707124 @default.
• W2109028022 hasConceptScore W2109028022C192562407 @default.
• W2109028022 hasConceptScore W2109028022C206755178 @default.
• W2109028022 hasConceptScore W2109028022C24326235 @default.
• W2109028022 hasConceptScore W2109028022C37977207 @default.
• W2109028022 hasConceptScore W2109028022C58373989 @default.
• W2109028022 hasConceptScore W2109028022C66938386 @default.
• W2109028022 hasConceptScore W2109028022C77066764 @default.
• W2109028022 hasConceptScore W2109028022C79772673 @default.
• W2109028022 hasIssue "5" @default.
• W2109028022 hasLocation W21090280221 @default.
• W2109028022 hasOpenAccess W2109028022 @default.
• W2109028022 hasPrimaryLocation W21090280221 @default.
• W2109028022 hasRelatedWork W1528208098 @default.
• W2109028022 hasRelatedWork W1995976170 @default.
• W2109028022 hasRelatedWork W2072692567 @default.
• W2109028022 hasRelatedWork W2078470917 @default.
• W2109028022 hasRelatedWork W2109028022 @default.
• W2109028022 hasRelatedWork W2112274618 @default.
• W2109028022 hasRelatedWork W2353736055 @default.
• W2109028022 hasRelatedWork W2510116514 @default.
• W2109028022 hasRelatedWork W2624586083 @default.
• W2109028022 hasRelatedWork W2741291743 @default.

• next