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- W2109130690 abstract "An idealized electrostatic MEMS device, consisting of a thin dielectric elastic membrane supported above a rigid ground plate, is analyzed. The upper surface of the membrane is coated with a thin conducting film. When a voltage V is applied to the thin conducting film, the membrane deflects towards the ground plate and if V is increased beyond a critical value V* (the voltage), touchdown occurs at finite time creating a so-called pull-in instability. The mathematical model lends to a nonlinear parabolic problem for the dynamic deflection of the thin dielectric membrane. By allowing for a spatially varying permittivity profile, it is shown that the instability can be delayed until larger values of V* and that greater distances can be achieved. Applying various analytical and numerical techniques, finite touchdown time and a refined description of MEMS touchdown behavior are also discussed." @default.
- W2109130690 created "2016-06-24" @default.
- W2109130690 creator A5004440950 @default.
- W2109130690 creator A5063782050 @default.
- W2109130690 date "2006-10-11" @default.
- W2109130690 modified "2023-09-25" @default.
- W2109130690 title "Dynamic Deflection of Electrostatic MEMS" @default.
- W2109130690 cites W1608211965 @default.
- W2109130690 cites W1982314892 @default.
- W2109130690 cites W2022114889 @default.
- W2109130690 cites W2044580900 @default.
- W2109130690 cites W2089906151 @default.
- W2109130690 cites W2094820190 @default.
- W2109130690 cites W2148935287 @default.
- W2109130690 cites W2164026034 @default.
- W2109130690 doi "https://doi.org/10.1109/icmens.2005.43" @default.
- W2109130690 hasPublicationYear "2006" @default.
- W2109130690 type Work @default.
- W2109130690 sameAs 2109130690 @default.
- W2109130690 citedByCount "0" @default.
- W2109130690 crossrefType "proceedings-article" @default.
- W2109130690 hasAuthorship W2109130690A5004440950 @default.
- W2109130690 hasAuthorship W2109130690A5063782050 @default.
- W2109130690 hasConcept C117626034 @default.
- W2109130690 hasConcept C119599485 @default.
- W2109130690 hasConcept C120665830 @default.
- W2109130690 hasConcept C121332964 @default.
- W2109130690 hasConcept C127413603 @default.
- W2109130690 hasConcept C133386390 @default.
- W2109130690 hasConcept C158622935 @default.
- W2109130690 hasConcept C165801399 @default.
- W2109130690 hasConcept C166957645 @default.
- W2109130690 hasConcept C168651791 @default.
- W2109130690 hasConcept C185592680 @default.
- W2109130690 hasConcept C192562407 @default.
- W2109130690 hasConcept C207821765 @default.
- W2109130690 hasConcept C2779860262 @default.
- W2109130690 hasConcept C2781355719 @default.
- W2109130690 hasConcept C37977207 @default.
- W2109130690 hasConcept C41625074 @default.
- W2109130690 hasConcept C49040817 @default.
- W2109130690 hasConcept C55493867 @default.
- W2109130690 hasConcept C57879066 @default.
- W2109130690 hasConcept C62520636 @default.
- W2109130690 hasConcept C95457728 @default.
- W2109130690 hasConceptScore W2109130690C117626034 @default.
- W2109130690 hasConceptScore W2109130690C119599485 @default.
- W2109130690 hasConceptScore W2109130690C120665830 @default.
- W2109130690 hasConceptScore W2109130690C121332964 @default.
- W2109130690 hasConceptScore W2109130690C127413603 @default.
- W2109130690 hasConceptScore W2109130690C133386390 @default.
- W2109130690 hasConceptScore W2109130690C158622935 @default.
- W2109130690 hasConceptScore W2109130690C165801399 @default.
- W2109130690 hasConceptScore W2109130690C166957645 @default.
- W2109130690 hasConceptScore W2109130690C168651791 @default.
- W2109130690 hasConceptScore W2109130690C185592680 @default.
- W2109130690 hasConceptScore W2109130690C192562407 @default.
- W2109130690 hasConceptScore W2109130690C207821765 @default.
- W2109130690 hasConceptScore W2109130690C2779860262 @default.
- W2109130690 hasConceptScore W2109130690C2781355719 @default.
- W2109130690 hasConceptScore W2109130690C37977207 @default.
- W2109130690 hasConceptScore W2109130690C41625074 @default.
- W2109130690 hasConceptScore W2109130690C49040817 @default.
- W2109130690 hasConceptScore W2109130690C55493867 @default.
- W2109130690 hasConceptScore W2109130690C57879066 @default.
- W2109130690 hasConceptScore W2109130690C62520636 @default.
- W2109130690 hasConceptScore W2109130690C95457728 @default.
- W2109130690 hasLocation W21091306901 @default.
- W2109130690 hasOpenAccess W2109130690 @default.
- W2109130690 hasPrimaryLocation W21091306901 @default.
- W2109130690 hasRelatedWork W1606164363 @default.
- W2109130690 hasRelatedWork W1675990164 @default.
- W2109130690 hasRelatedWork W1930374798 @default.
- W2109130690 hasRelatedWork W1975221843 @default.
- W2109130690 hasRelatedWork W1979513208 @default.
- W2109130690 hasRelatedWork W2002253877 @default.
- W2109130690 hasRelatedWork W2028441526 @default.
- W2109130690 hasRelatedWork W2036771017 @default.
- W2109130690 hasRelatedWork W2041394190 @default.
- W2109130690 hasRelatedWork W2042986297 @default.
- W2109130690 hasRelatedWork W2097844347 @default.
- W2109130690 hasRelatedWork W2098046948 @default.
- W2109130690 hasRelatedWork W2105394554 @default.
- W2109130690 hasRelatedWork W2110160823 @default.
- W2109130690 hasRelatedWork W2135320997 @default.
- W2109130690 hasRelatedWork W2137656145 @default.
- W2109130690 hasRelatedWork W2144242406 @default.
- W2109130690 hasRelatedWork W2324528592 @default.
- W2109130690 hasRelatedWork W2360461201 @default.
- W2109130690 hasRelatedWork W4335248 @default.
- W2109130690 isParatext "false" @default.
- W2109130690 isRetracted "false" @default.
- W2109130690 magId "2109130690" @default.
- W2109130690 workType "article" @default.