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- W2109159432 abstract "Forbidden pitches that are introduced under certain illumination conditions can have extremely narrow depth of focus (DOF), so that when a lithographic pattern is transferred to a wafer, the forbidden pitch should be removed from the layout. However, the sensitivity of this narrow DOF can be utilized to monitor focus changes in the scanner system itself. In this paper, a newly developed focus monitoring method utilizing the forbidden pitches is introduced and the sensitivity and advantages of this method are discussed in detail." @default.
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- W2109159432 date "2011-10-01" @default.
- W2109159432 modified "2023-09-24" @default.
- W2109159432 title "Highly sensitive and fast scanner focus monitoring method using forbidden pitch pattern" @default.
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- W2109159432 doi "https://doi.org/10.1117/1.3658022" @default.
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