Matches in SemOpenAlex for { <https://semopenalex.org/work/W2109181838> ?p ?o ?g. }
Showing items 1 to 95 of
95
with 100 items per page.
- W2109181838 endingPage "34" @default.
- W2109181838 startingPage "33" @default.
- W2109181838 abstract "The LPCVD-DADBS process has demonstrated that: 1) perfectly conformal coatings are obtained at 450 and 500° C, and only slightly less so at 575°; 2) phosphorus-doped oxide is produced when trimethylphosphite and oxygen is added to the gas stream and the doped oxide has an intrinsic stress 0.42 times that of undoped oxide; 3) silicon oxide formation occurs without any incorporation of carbon; and 4) the electrical properties are more than adequate for device applications." @default.
- W2109181838 created "2016-06-24" @default.
- W2109181838 creator A5055582372 @default.
- W2109181838 date "1986-05-28" @default.
- W2109181838 modified "2023-09-28" @default.
- W2109181838 title "The Low Pressure Chemical Vapor Deposition of Silicon Oxide Films in the Temperature Range 450 to 600° C from a New Source: Diacetoxyditertiarybutoxysilane" @default.
- W2109181838 hasPublicationYear "1986" @default.
- W2109181838 type Work @default.
- W2109181838 sameAs 2109181838 @default.
- W2109181838 citedByCount "0" @default.
- W2109181838 crossrefType "proceedings-article" @default.
- W2109181838 hasAuthorship W2109181838A5055582372 @default.
- W2109181838 hasConcept C104779481 @default.
- W2109181838 hasConcept C107872376 @default.
- W2109181838 hasConcept C113196181 @default.
- W2109181838 hasConcept C121332964 @default.
- W2109181838 hasConcept C127413603 @default.
- W2109181838 hasConcept C140205800 @default.
- W2109181838 hasConcept C151730666 @default.
- W2109181838 hasConcept C159985019 @default.
- W2109181838 hasConcept C178790620 @default.
- W2109181838 hasConcept C179104552 @default.
- W2109181838 hasConcept C185592680 @default.
- W2109181838 hasConcept C191897082 @default.
- W2109181838 hasConcept C192562407 @default.
- W2109181838 hasConcept C2777431650 @default.
- W2109181838 hasConcept C2779105228 @default.
- W2109181838 hasConcept C2779851234 @default.
- W2109181838 hasConcept C2816523 @default.
- W2109181838 hasConcept C39353612 @default.
- W2109181838 hasConcept C42360764 @default.
- W2109181838 hasConcept C49040817 @default.
- W2109181838 hasConcept C540031477 @default.
- W2109181838 hasConcept C544956773 @default.
- W2109181838 hasConcept C57410435 @default.
- W2109181838 hasConcept C57863236 @default.
- W2109181838 hasConcept C64297162 @default.
- W2109181838 hasConcept C86803240 @default.
- W2109181838 hasConcept C97355855 @default.
- W2109181838 hasConceptScore W2109181838C104779481 @default.
- W2109181838 hasConceptScore W2109181838C107872376 @default.
- W2109181838 hasConceptScore W2109181838C113196181 @default.
- W2109181838 hasConceptScore W2109181838C121332964 @default.
- W2109181838 hasConceptScore W2109181838C127413603 @default.
- W2109181838 hasConceptScore W2109181838C140205800 @default.
- W2109181838 hasConceptScore W2109181838C151730666 @default.
- W2109181838 hasConceptScore W2109181838C159985019 @default.
- W2109181838 hasConceptScore W2109181838C178790620 @default.
- W2109181838 hasConceptScore W2109181838C179104552 @default.
- W2109181838 hasConceptScore W2109181838C185592680 @default.
- W2109181838 hasConceptScore W2109181838C191897082 @default.
- W2109181838 hasConceptScore W2109181838C192562407 @default.
- W2109181838 hasConceptScore W2109181838C2777431650 @default.
- W2109181838 hasConceptScore W2109181838C2779105228 @default.
- W2109181838 hasConceptScore W2109181838C2779851234 @default.
- W2109181838 hasConceptScore W2109181838C2816523 @default.
- W2109181838 hasConceptScore W2109181838C39353612 @default.
- W2109181838 hasConceptScore W2109181838C42360764 @default.
- W2109181838 hasConceptScore W2109181838C49040817 @default.
- W2109181838 hasConceptScore W2109181838C540031477 @default.
- W2109181838 hasConceptScore W2109181838C544956773 @default.
- W2109181838 hasConceptScore W2109181838C57410435 @default.
- W2109181838 hasConceptScore W2109181838C57863236 @default.
- W2109181838 hasConceptScore W2109181838C64297162 @default.
- W2109181838 hasConceptScore W2109181838C86803240 @default.
- W2109181838 hasConceptScore W2109181838C97355855 @default.
- W2109181838 hasLocation W21091818381 @default.
- W2109181838 hasOpenAccess W2109181838 @default.
- W2109181838 hasPrimaryLocation W21091818381 @default.
- W2109181838 hasRelatedWork W1545990729 @default.
- W2109181838 hasRelatedWork W1971852648 @default.
- W2109181838 hasRelatedWork W1972384211 @default.
- W2109181838 hasRelatedWork W1984954218 @default.
- W2109181838 hasRelatedWork W1985767576 @default.
- W2109181838 hasRelatedWork W1991635881 @default.
- W2109181838 hasRelatedWork W2021311361 @default.
- W2109181838 hasRelatedWork W2042623474 @default.
- W2109181838 hasRelatedWork W2043092701 @default.
- W2109181838 hasRelatedWork W2073099356 @default.
- W2109181838 hasRelatedWork W2074830023 @default.
- W2109181838 hasRelatedWork W2093291697 @default.
- W2109181838 hasRelatedWork W2095029072 @default.
- W2109181838 hasRelatedWork W2098130488 @default.
- W2109181838 hasRelatedWork W2168752209 @default.
- W2109181838 hasRelatedWork W2788131428 @default.
- W2109181838 hasRelatedWork W2952827115 @default.
- W2109181838 hasRelatedWork W3141373946 @default.
- W2109181838 hasRelatedWork W2183650732 @default.
- W2109181838 hasRelatedWork W2860129056 @default.
- W2109181838 isParatext "false" @default.
- W2109181838 isRetracted "false" @default.
- W2109181838 magId "2109181838" @default.
- W2109181838 workType "article" @default.