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• W2109181906 abstract "Recent work in the semiconducting nitrides AlN, GaN, InN and their ternary derivatives includes the low-temperature enhancement of MOCVD growth through a combination of ultraviolet laser photodissociation of metal precursors and microwave-plasma activated nitrogen radicals. These modifications allow the relative simplicity of low-pressure MOCVD to be successfully shifted to the 500-600/spl deg/C temperature range for GaN, and to room temperature for AlN. Advantages include the availability of short-period multilayers and abrupt heterostructures, free from the cross-diffusion of either ternary constituents or dopants. Thermally fragile substrates now also become available. The binaries grown by this method compare well with conventional MOCVD, room-temperature mobilities up to 400 cm/sup 2/ V/sup -1/ s/sup -1/ are obtained in GaN and as-grown carrier concentrations in the range 10/sup 15/-10/sup 17/ cm/sup -3/ can be controlled via the plasma density. CP/sub 2/Mg is used as counterdopant. Composition of AlGaN and InGaN is determined by precursor ratios, the relationship is linear in the former case but not in the latter. AlN with excellent dielectric properties has been deposited on unstable CdHgTe at 50C. We also mention the roles of microcrystallinity and polytypism in the physical properties of our materials as a function of substrate/buffer combination." @default.
• W2109181906 created "2016-06-24" @default.
• W2109181906 creator A5040137562 @default.
• W2109181906 date "2002-12-24" @default.
• W2109181906 modified "2023-09-25" @default.
• W2109181906 title "Low-temperature chemical vapour deposited semiconducting nitrides" @default.
• W2109181906 cites W131599069 @default.
• W2109181906 cites W1966838581 @default.
• W2109181906 cites W1974463941 @default.
• W2109181906 cites W1977920155 @default.
• W2109181906 cites W1983283787 @default.
• W2109181906 cites W1996846925 @default.
• W2109181906 cites W2003909095 @default.
• W2109181906 cites W2004381717 @default.
• W2109181906 cites W2005844119 @default.
• W2109181906 cites W2007930532 @default.
• W2109181906 cites W2009891531 @default.
• W2109181906 cites W2013820711 @default.
• W2109181906 cites W2020453698 @default.
• W2109181906 cites W2020973266 @default.
• W2109181906 cites W2033194423 @default.
• W2109181906 cites W2036534093 @default.
• W2109181906 cites W2040179900 @default.
• W2109181906 cites W2043257450 @default.
• W2109181906 cites W2058461408 @default.
• W2109181906 cites W2067714641 @default.
• W2109181906 cites W2067893436 @default.
• W2109181906 cites W2069099261 @default.
• W2109181906 cites W2071942011 @default.
• W2109181906 cites W2079874678 @default.
• W2109181906 cites W2079943447 @default.
• W2109181906 cites W2082318210 @default.
• W2109181906 cites W2089219742 @default.
• W2109181906 cites W2113656927 @default.
• W2109181906 cites W2134158954 @default.
• W2109181906 cites W2141493987 @default.
• W2109181906 cites W2145309034 @default.
• W2109181906 cites W2153232135 @default.
• W2109181906 cites W2313910089 @default.
• W2109181906 cites W2013832688 @default.
• W2109181906 doi "https://doi.org/10.1109/commad.1996.610147" @default.
• W2109181906 hasPublicationYear "2002" @default.
• W2109181906 type Work @default.
• W2109181906 sameAs 2109181906 @default.
• W2109181906 citedByCount "0" @default.
• W2109181906 crossrefType "proceedings-article" @default.
• W2109181906 hasAuthorship W2109181906A5040137562 @default.
• W2109181906 hasConcept C110738630 @default.
• W2109181906 hasConcept C111368507 @default.
• W2109181906 hasConcept C113196181 @default.
• W2109181906 hasConcept C121332964 @default.
• W2109181906 hasConcept C127313418 @default.
• W2109181906 hasConcept C133386390 @default.
• W2109181906 hasConcept C153294291 @default.
• W2109181906 hasConcept C171250308 @default.
• W2109181906 hasConcept C175665537 @default.
• W2109181906 hasConcept C185592680 @default.
• W2109181906 hasConcept C191952053 @default.
• W2109181906 hasConcept C192562407 @default.
• W2109181906 hasConcept C194760766 @default.
• W2109181906 hasConcept C199360897 @default.
• W2109181906 hasConcept C2777289219 @default.
• W2109181906 hasConcept C2779227376 @default.
• W2109181906 hasConcept C39353612 @default.
• W2109181906 hasConcept C41008148 @default.
• W2109181906 hasConcept C43617362 @default.
• W2109181906 hasConcept C49040817 @default.
• W2109181906 hasConcept C57863236 @default.
• W2109181906 hasConcept C64452783 @default.
• W2109181906 hasConcept C79794668 @default.
• W2109181906 hasConceptScore W2109181906C110738630 @default.
• W2109181906 hasConceptScore W2109181906C111368507 @default.
• W2109181906 hasConceptScore W2109181906C113196181 @default.
• W2109181906 hasConceptScore W2109181906C121332964 @default.
• W2109181906 hasConceptScore W2109181906C127313418 @default.
• W2109181906 hasConceptScore W2109181906C133386390 @default.
• W2109181906 hasConceptScore W2109181906C153294291 @default.
• W2109181906 hasConceptScore W2109181906C171250308 @default.
• W2109181906 hasConceptScore W2109181906C175665537 @default.
• W2109181906 hasConceptScore W2109181906C185592680 @default.
• W2109181906 hasConceptScore W2109181906C191952053 @default.
• W2109181906 hasConceptScore W2109181906C192562407 @default.
• W2109181906 hasConceptScore W2109181906C194760766 @default.
• W2109181906 hasConceptScore W2109181906C199360897 @default.
• W2109181906 hasConceptScore W2109181906C2777289219 @default.
• W2109181906 hasConceptScore W2109181906C2779227376 @default.
• W2109181906 hasConceptScore W2109181906C39353612 @default.
• W2109181906 hasConceptScore W2109181906C41008148 @default.
• W2109181906 hasConceptScore W2109181906C43617362 @default.
• W2109181906 hasConceptScore W2109181906C49040817 @default.
• W2109181906 hasConceptScore W2109181906C57863236 @default.
• W2109181906 hasConceptScore W2109181906C64452783 @default.
• W2109181906 hasConceptScore W2109181906C79794668 @default.
• W2109181906 hasLocation W21091819061 @default.
• W2109181906 hasOpenAccess W2109181906 @default.
• W2109181906 hasPrimaryLocation W21091819061 @default.
• W2109181906 hasRelatedWork W1965160536 @default.
• W2109181906 hasRelatedWork W1981718265 @default.
• W2109181906 hasRelatedWork W2019468213 @default.
• W2109181906 hasRelatedWork W2040999361 @default.

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