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- W2109308543 abstract "This paper describes the development of the nonresonant ultrasonic motor (NRUSM) applied to a 300-mm-stroke ultra-precision stage for future LSI manufacturing, in particular electron beam based technologies. Advantages of the NRUSM are high resolution, no magnetic noise generation, high servo rigidity and high retention. It is confirmed that the NRUSM is suitable for ultra-precision positioning, and slow- and high-velocity feeding at closed-loop controls. The performance of the NRUSM-driven stage includes; (1) 85 mm/s feed velocity with average acceleration 375 mm/s2 over the 300 mm stroke at open-loop control; (2) ±0.69 nm positioning accuracy at step and repeat response, 17 ms average positioning time for ±30 nm positioning accuracy, positional error during constant velocity feeding below ±1.5 nm for 100 nm/s and ±40 nm for 20 mm/s, and velocity ripple at 36 mm/s is below 0.04% at closed-loop control." @default.
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- W2109308543 date "2002-09-15" @default.
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- W2109308543 title "Sub-Nanometer Resolution Ultrasonic Motor for 300 mm Wafer Lithography Precision Stage" @default.
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- W2109308543 doi "https://doi.org/10.1143/jjap.41.5858" @default.
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