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• W2109384764 abstract "Vanadium oxide thin films were deposited on <TEX>$c-Al_2O_3$</TEX> (001) substrate by in-situ RF magnetron sputtering. Oxygen partial pressure was adjusted to prepare thermochromic <TEX>$VO_2$</TEX> phase. X-ray diffraction patterns and scanning electron microscopy convincingly showed that plate-like <TEX>$V_2O_5$</TEX> grains were changed into round-shape <TEX>$VO_2$</TEX> grains as oxygen partial pressure decreased. After the optimized deposition conditions were fixed, the effect of substrate temperature and orientation on the optical properties of <TEX>$VO_2$</TEX> thin films was analyzed." @default.
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• W2109384764 date "2013-10-31" @default.
• W2109384764 modified "2023-10-05" @default.
• W2109384764 title "Optical properties of vanadium dioxide thin films on c-Al2O3(001) substrates by in-situ RF magnetron sputtering" @default.
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• W2109384764 doi "https://doi.org/10.6111/jkcgct.2013.23.5.224" @default.
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