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- W2109449920 abstract "This paper describes a software system for Computer Aided Manufacturing (CAM) of VLSI circuits being developed at Carnegie-Mellon University. In developing the system, a major effort was devoted towards the computational efficiency of the algorithms implemented. The results obtained with this system indicate that it can be used for a variety of real-life tasks, such as optimal process design, process diagnosis and control, in commercial fabrication lines. We believe that such a system provides an attractive extension for the CAM systems that are currently being introduced to VLSI fabrication processes." @default.
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- W2109449920 date "1985-06-01" @default.
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- W2109449920 title "CMU-CAM System" @default.
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- W2109449920 doi "https://doi.org/10.5555/317825.317877" @default.
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