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• W2109461108 abstract "A surface micromachined accelerometer with on-chip electronics realized in a 3 /spl mu/m BiCMOS technology is described. The sensing element consists of a thin film of polysilicon that is deposited after fabrication of the electronic circuitry. Acceleration is measured by capacitively sensing sub-angstrom displacements of a mechanical proof-mass weighing 0.5 /spl mu/grams. The sensor uses force-feedback and achieves a resolution of 1.6 mg//spl radic/(Hz) (1 g=9.8 m/s/sup 2/). The limitations arising from the small size and mass of the sensing element and means for improvement are discussed. The small active die area of less than 3 mm/sup 2/ including the sensor along with the possibility to combine several different sensors on a single chip make this approach particularly attractive for applications demanding very small form factors." @default.
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• W2109461108 date "1995-01-01" @default.
• W2109461108 modified "2023-10-05" @default.
• W2109461108 title "A monolithic surface micromachined accelerometer with digital output" @default.
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• W2109461108 doi "https://doi.org/10.1109/4.482163" @default.
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