Matches in SemOpenAlex for { <https://semopenalex.org/work/W2109486518> ?p ?o ?g. }
Showing items 1 to 96 of
96
with 100 items per page.
- W2109486518 endingPage "2004" @default.
- W2109486518 startingPage "2002" @default.
- W2109486518 abstract "Plasma-enhanced chemical-vapor deposition of amorphous silicon by a square-wave amplitude-modulated radio-frequency excitation has been studied by optical emission spectroscopy and plasma modeling. By the modulation, the deposition rate is increased or reduced, depending on the plasma parameters. The increase in the deposition rate in powder-free (α-regime) plasmas is explained by the behavior of the electrons. High-energy electrons cause a large production of radicals at the onset of the plasma, as evidenced by an overshoot in optical emission. This is confirmed by a one-dimensional fluid model. An optimum in the deposition rate at a modulation frequency of about 100 kHz is determined by the decay time of the electron density." @default.
- W2109486518 created "2016-06-24" @default.
- W2109486518 creator A5045108434 @default.
- W2109486518 creator A5055191245 @default.
- W2109486518 creator A5078647611 @default.
- W2109486518 creator A5089315442 @default.
- W2109486518 date "2000-04-10" @default.
- W2109486518 modified "2023-09-27" @default.
- W2109486518 title "Deposition rate in modulated radio-frequency silane plasmas" @default.
- W2109486518 cites W1965685697 @default.
- W2109486518 cites W1971657321 @default.
- W2109486518 cites W1972701897 @default.
- W2109486518 cites W1988654934 @default.
- W2109486518 cites W2002878630 @default.
- W2109486518 cites W2029318150 @default.
- W2109486518 cites W2038596769 @default.
- W2109486518 cites W2043057374 @default.
- W2109486518 cites W2108575929 @default.
- W2109486518 doi "https://doi.org/10.1063/1.126235" @default.
- W2109486518 hasPublicationYear "2000" @default.
- W2109486518 type Work @default.
- W2109486518 sameAs 2109486518 @default.
- W2109486518 citedByCount "24" @default.
- W2109486518 countsByYear W21094865182012 @default.
- W2109486518 countsByYear W21094865182016 @default.
- W2109486518 countsByYear W21094865182021 @default.
- W2109486518 crossrefType "journal-article" @default.
- W2109486518 hasAuthorship W2109486518A5045108434 @default.
- W2109486518 hasAuthorship W2109486518A5055191245 @default.
- W2109486518 hasAuthorship W2109486518A5078647611 @default.
- W2109486518 hasAuthorship W2109486518A5089315442 @default.
- W2109486518 hasConcept C113196181 @default.
- W2109486518 hasConcept C121332964 @default.
- W2109486518 hasConcept C147120987 @default.
- W2109486518 hasConcept C151730666 @default.
- W2109486518 hasConcept C159985019 @default.
- W2109486518 hasConcept C184779094 @default.
- W2109486518 hasConcept C185592680 @default.
- W2109486518 hasConcept C192562407 @default.
- W2109486518 hasConcept C2778024649 @default.
- W2109486518 hasConcept C2816523 @default.
- W2109486518 hasConcept C38347018 @default.
- W2109486518 hasConcept C41008148 @default.
- W2109486518 hasConcept C43503373 @default.
- W2109486518 hasConcept C43617362 @default.
- W2109486518 hasConcept C49040817 @default.
- W2109486518 hasConcept C57410435 @default.
- W2109486518 hasConcept C62520636 @default.
- W2109486518 hasConcept C64297162 @default.
- W2109486518 hasConcept C74064498 @default.
- W2109486518 hasConcept C76155785 @default.
- W2109486518 hasConcept C82706917 @default.
- W2109486518 hasConcept C86803240 @default.
- W2109486518 hasConceptScore W2109486518C113196181 @default.
- W2109486518 hasConceptScore W2109486518C121332964 @default.
- W2109486518 hasConceptScore W2109486518C147120987 @default.
- W2109486518 hasConceptScore W2109486518C151730666 @default.
- W2109486518 hasConceptScore W2109486518C159985019 @default.
- W2109486518 hasConceptScore W2109486518C184779094 @default.
- W2109486518 hasConceptScore W2109486518C185592680 @default.
- W2109486518 hasConceptScore W2109486518C192562407 @default.
- W2109486518 hasConceptScore W2109486518C2778024649 @default.
- W2109486518 hasConceptScore W2109486518C2816523 @default.
- W2109486518 hasConceptScore W2109486518C38347018 @default.
- W2109486518 hasConceptScore W2109486518C41008148 @default.
- W2109486518 hasConceptScore W2109486518C43503373 @default.
- W2109486518 hasConceptScore W2109486518C43617362 @default.
- W2109486518 hasConceptScore W2109486518C49040817 @default.
- W2109486518 hasConceptScore W2109486518C57410435 @default.
- W2109486518 hasConceptScore W2109486518C62520636 @default.
- W2109486518 hasConceptScore W2109486518C64297162 @default.
- W2109486518 hasConceptScore W2109486518C74064498 @default.
- W2109486518 hasConceptScore W2109486518C76155785 @default.
- W2109486518 hasConceptScore W2109486518C82706917 @default.
- W2109486518 hasConceptScore W2109486518C86803240 @default.
- W2109486518 hasIssue "15" @default.
- W2109486518 hasLocation W21094865181 @default.
- W2109486518 hasOpenAccess W2109486518 @default.
- W2109486518 hasPrimaryLocation W21094865181 @default.
- W2109486518 hasRelatedWork W1591573991 @default.
- W2109486518 hasRelatedWork W2046825369 @default.
- W2109486518 hasRelatedWork W2078183599 @default.
- W2109486518 hasRelatedWork W2087328166 @default.
- W2109486518 hasRelatedWork W2119730802 @default.
- W2109486518 hasRelatedWork W2334620464 @default.
- W2109486518 hasRelatedWork W2352452677 @default.
- W2109486518 hasRelatedWork W2468769701 @default.
- W2109486518 hasRelatedWork W3104083206 @default.
- W2109486518 hasRelatedWork W2152946510 @default.
- W2109486518 hasVolume "76" @default.
- W2109486518 isParatext "false" @default.
- W2109486518 isRetracted "false" @default.
- W2109486518 magId "2109486518" @default.
- W2109486518 workType "article" @default.