Matches in SemOpenAlex for { <https://semopenalex.org/work/W2109555732> ?p ?o ?g. }
Showing items 1 to 84 of
84
with 100 items per page.
- W2109555732 endingPage "115" @default.
- W2109555732 startingPage "110" @default.
- W2109555732 abstract "We have proposed a novel poly-Si/a-Si/HfSiON transistor to enhance reliabilities without performance degradation for a 65-nm-node low standby power (LSTP) application. By insertion of a thin amorphous-Si layer between the Poly-Si gate electrode and HfSiON, both phosphorus penetration from gate electrode and a reaction at gate electrode/HfSiON interface are successfully suppressed, so that positive bias temperature instability, one of the biggest issues for high-k gate dielectric, is drastically improved by two orders of magnitude. By carefully optimizing the gate stack structure of HfSiON, the HfSiON device can satisfy both lower gate leakage and gate-induced drain leakage at the same time. As a result, an excellent I <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>on</sub> - I <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>standby</sub> (= I <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>g</sub> + l <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>off</sub> ) characteristic can be achieved, compared to the conventional SiON device. The a-Si insertion technique can realize the combination between the high-k gate dielectric and Poly-Si for future LSTP applications." @default.
- W2109555732 created "2016-06-24" @default.
- W2109555732 creator A5018078218 @default.
- W2109555732 creator A5028916784 @default.
- W2109555732 creator A5082054500 @default.
- W2109555732 creator A5082815940 @default.
- W2109555732 date "2008-01-01" @default.
- W2109555732 modified "2023-09-26" @default.
- W2109555732 title "Highly Manufacturable and Reliable HfSiON N-FET With Poly-Si/a-Si Stacked Gate for LSTP Applications" @default.
- W2109555732 cites W1526363658 @default.
- W2109555732 cites W1554189526 @default.
- W2109555732 cites W1844532462 @default.
- W2109555732 cites W1927081464 @default.
- W2109555732 cites W1970632387 @default.
- W2109555732 cites W1974650789 @default.
- W2109555732 cites W2075642190 @default.
- W2109555732 cites W2095683139 @default.
- W2109555732 cites W2114602166 @default.
- W2109555732 cites W2117465333 @default.
- W2109555732 cites W2124340473 @default.
- W2109555732 cites W2132774885 @default.
- W2109555732 cites W2135661192 @default.
- W2109555732 cites W2170331381 @default.
- W2109555732 cites W2468412651 @default.
- W2109555732 cites W2541356016 @default.
- W2109555732 cites W2543907405 @default.
- W2109555732 doi "https://doi.org/10.1109/tsm.2007.914382" @default.
- W2109555732 hasPublicationYear "2008" @default.
- W2109555732 type Work @default.
- W2109555732 sameAs 2109555732 @default.
- W2109555732 citedByCount "2" @default.
- W2109555732 countsByYear W21095557322020 @default.
- W2109555732 crossrefType "journal-article" @default.
- W2109555732 hasAuthorship W2109555732A5018078218 @default.
- W2109555732 hasAuthorship W2109555732A5028916784 @default.
- W2109555732 hasAuthorship W2109555732A5082054500 @default.
- W2109555732 hasAuthorship W2109555732A5082815940 @default.
- W2109555732 hasConcept C119599485 @default.
- W2109555732 hasConcept C127413603 @default.
- W2109555732 hasConcept C133386390 @default.
- W2109555732 hasConcept C139719470 @default.
- W2109555732 hasConcept C162324750 @default.
- W2109555732 hasConcept C16317505 @default.
- W2109555732 hasConcept C165801399 @default.
- W2109555732 hasConcept C166972891 @default.
- W2109555732 hasConcept C172385210 @default.
- W2109555732 hasConcept C192562407 @default.
- W2109555732 hasConcept C2777042071 @default.
- W2109555732 hasConcept C49040817 @default.
- W2109555732 hasConcept C7140552 @default.
- W2109555732 hasConceptScore W2109555732C119599485 @default.
- W2109555732 hasConceptScore W2109555732C127413603 @default.
- W2109555732 hasConceptScore W2109555732C133386390 @default.
- W2109555732 hasConceptScore W2109555732C139719470 @default.
- W2109555732 hasConceptScore W2109555732C162324750 @default.
- W2109555732 hasConceptScore W2109555732C16317505 @default.
- W2109555732 hasConceptScore W2109555732C165801399 @default.
- W2109555732 hasConceptScore W2109555732C166972891 @default.
- W2109555732 hasConceptScore W2109555732C172385210 @default.
- W2109555732 hasConceptScore W2109555732C192562407 @default.
- W2109555732 hasConceptScore W2109555732C2777042071 @default.
- W2109555732 hasConceptScore W2109555732C49040817 @default.
- W2109555732 hasConceptScore W2109555732C7140552 @default.
- W2109555732 hasIssue "1" @default.
- W2109555732 hasLocation W21095557321 @default.
- W2109555732 hasOpenAccess W2109555732 @default.
- W2109555732 hasPrimaryLocation W21095557321 @default.
- W2109555732 hasRelatedWork W1581788205 @default.
- W2109555732 hasRelatedWork W2070614410 @default.
- W2109555732 hasRelatedWork W2357046631 @default.
- W2109555732 hasRelatedWork W2368176392 @default.
- W2109555732 hasRelatedWork W3020235537 @default.
- W2109555732 hasRelatedWork W3092007158 @default.
- W2109555732 hasRelatedWork W3140942752 @default.
- W2109555732 hasRelatedWork W3211886203 @default.
- W2109555732 hasRelatedWork W2511215904 @default.
- W2109555732 hasRelatedWork W2523403620 @default.
- W2109555732 hasVolume "21" @default.
- W2109555732 isParatext "false" @default.
- W2109555732 isRetracted "false" @default.
- W2109555732 magId "2109555732" @default.
- W2109555732 workType "article" @default.