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- W2109594210 abstract "Ultra shallow arsenic profiles implanted into Si with an energy range from 0.5 to 3 keV to a dose of 8/spl times/10/sup 14/ ions/cm/sup 2/ before and after spike annealing were measured by medium energy ion scattering (MEIS) with a toroidal electrostatic analyzer (TEA). A shift of the peak of arsenic profile to the surface after spike annealing was observed by MEIS measurement. Most of the implanted arsenic atoms were trapped in the native oxide layer after spike annealing." @default.
- W2109594210 created "2016-06-24" @default.
- W2109594210 creator A5010757568 @default.
- W2109594210 creator A5042509384 @default.
- W2109594210 creator A5055940475 @default.
- W2109594210 creator A5058473044 @default.
- W2109594210 creator A5078158874 @default.
- W2109594210 creator A5087273421 @default.
- W2109594210 date "2005-01-01" @default.
- W2109594210 modified "2023-10-16" @default.
- W2109594210 title "Ultra shallow As profiling before and after spike annealing using medium energy ion scattering" @default.
- W2109594210 doi "https://doi.org/10.1109/iwjt.2005.203878" @default.
- W2109594210 hasPublicationYear "2005" @default.
- W2109594210 type Work @default.
- W2109594210 sameAs 2109594210 @default.
- W2109594210 citedByCount "1" @default.
- W2109594210 crossrefType "proceedings-article" @default.
- W2109594210 hasAuthorship W2109594210A5010757568 @default.
- W2109594210 hasAuthorship W2109594210A5042509384 @default.
- W2109594210 hasAuthorship W2109594210A5055940475 @default.
- W2109594210 hasAuthorship W2109594210A5058473044 @default.
- W2109594210 hasAuthorship W2109594210A5078158874 @default.
- W2109594210 hasAuthorship W2109594210A5087273421 @default.
- W2109594210 hasConcept C113196181 @default.
- W2109594210 hasConcept C120665830 @default.
- W2109594210 hasConcept C121332964 @default.
- W2109594210 hasConcept C145148216 @default.
- W2109594210 hasConcept C160671074 @default.
- W2109594210 hasConcept C178790620 @default.
- W2109594210 hasConcept C184779094 @default.
- W2109594210 hasConcept C185592680 @default.
- W2109594210 hasConcept C191486275 @default.
- W2109594210 hasConcept C191897082 @default.
- W2109594210 hasConcept C192562407 @default.
- W2109594210 hasConcept C2777855556 @default.
- W2109594210 hasConcept C2779851234 @default.
- W2109594210 hasConcept C41823505 @default.
- W2109594210 hasConcept C43617362 @default.
- W2109594210 hasConcept C49040817 @default.
- W2109594210 hasConcept C502230775 @default.
- W2109594210 hasConcept C544956773 @default.
- W2109594210 hasConceptScore W2109594210C113196181 @default.
- W2109594210 hasConceptScore W2109594210C120665830 @default.
- W2109594210 hasConceptScore W2109594210C121332964 @default.
- W2109594210 hasConceptScore W2109594210C145148216 @default.
- W2109594210 hasConceptScore W2109594210C160671074 @default.
- W2109594210 hasConceptScore W2109594210C178790620 @default.
- W2109594210 hasConceptScore W2109594210C184779094 @default.
- W2109594210 hasConceptScore W2109594210C185592680 @default.
- W2109594210 hasConceptScore W2109594210C191486275 @default.
- W2109594210 hasConceptScore W2109594210C191897082 @default.
- W2109594210 hasConceptScore W2109594210C192562407 @default.
- W2109594210 hasConceptScore W2109594210C2777855556 @default.
- W2109594210 hasConceptScore W2109594210C2779851234 @default.
- W2109594210 hasConceptScore W2109594210C41823505 @default.
- W2109594210 hasConceptScore W2109594210C43617362 @default.
- W2109594210 hasConceptScore W2109594210C49040817 @default.
- W2109594210 hasConceptScore W2109594210C502230775 @default.
- W2109594210 hasConceptScore W2109594210C544956773 @default.
- W2109594210 hasLocation W21095942101 @default.
- W2109594210 hasOpenAccess W2109594210 @default.
- W2109594210 hasPrimaryLocation W21095942101 @default.
- W2109594210 hasRelatedWork W1987884245 @default.
- W2109594210 hasRelatedWork W2009252896 @default.
- W2109594210 hasRelatedWork W2028024115 @default.
- W2109594210 hasRelatedWork W2042925312 @default.
- W2109594210 hasRelatedWork W2046953599 @default.
- W2109594210 hasRelatedWork W2065669148 @default.
- W2109594210 hasRelatedWork W2088081281 @default.
- W2109594210 hasRelatedWork W2094221410 @default.
- W2109594210 hasRelatedWork W2275386326 @default.
- W2109594210 hasRelatedWork W4321641639 @default.
- W2109594210 isParatext "false" @default.
- W2109594210 isRetracted "false" @default.
- W2109594210 magId "2109594210" @default.
- W2109594210 workType "article" @default.