Matches in SemOpenAlex for { <https://semopenalex.org/work/W2109713013> ?p ?o ?g. }
Showing items 1 to 77 of
77
with 100 items per page.
- W2109713013 abstract "In this paper we discuss the current damasense processes of copper metallization. The study will be focus on some key technologies such as novel barrier, copper deposition and chemical mechanical polishing (CMP) processes." @default.
- W2109713013 created "2016-06-24" @default.
- W2109713013 creator A5004292113 @default.
- W2109713013 creator A5051338992 @default.
- W2109713013 creator A5076455111 @default.
- W2109713013 creator A5082833628 @default.
- W2109713013 creator A5089809036 @default.
- W2109713013 date "2002-11-13" @default.
- W2109713013 modified "2023-09-27" @default.
- W2109713013 title "Study on key technologies of copper metallization in ULSI" @default.
- W2109713013 cites W2525360242 @default.
- W2109713013 doi "https://doi.org/10.1109/icsict.2001.981497" @default.
- W2109713013 hasPublicationYear "2002" @default.
- W2109713013 type Work @default.
- W2109713013 sameAs 2109713013 @default.
- W2109713013 citedByCount "0" @default.
- W2109713013 crossrefType "proceedings-article" @default.
- W2109713013 hasAuthorship W2109713013A5004292113 @default.
- W2109713013 hasAuthorship W2109713013A5051338992 @default.
- W2109713013 hasAuthorship W2109713013A5076455111 @default.
- W2109713013 hasAuthorship W2109713013A5082833628 @default.
- W2109713013 hasAuthorship W2109713013A5089809036 @default.
- W2109713013 hasConcept C120665830 @default.
- W2109713013 hasConcept C121332964 @default.
- W2109713013 hasConcept C127413603 @default.
- W2109713013 hasConcept C138113353 @default.
- W2109713013 hasConcept C171250308 @default.
- W2109713013 hasConcept C180088628 @default.
- W2109713013 hasConcept C191897082 @default.
- W2109713013 hasConcept C192209626 @default.
- W2109713013 hasConcept C192562407 @default.
- W2109713013 hasConcept C26517878 @default.
- W2109713013 hasConcept C38652104 @default.
- W2109713013 hasConcept C41008148 @default.
- W2109713013 hasConcept C544778455 @default.
- W2109713013 hasConcept C61696701 @default.
- W2109713013 hasConceptScore W2109713013C120665830 @default.
- W2109713013 hasConceptScore W2109713013C121332964 @default.
- W2109713013 hasConceptScore W2109713013C127413603 @default.
- W2109713013 hasConceptScore W2109713013C138113353 @default.
- W2109713013 hasConceptScore W2109713013C171250308 @default.
- W2109713013 hasConceptScore W2109713013C180088628 @default.
- W2109713013 hasConceptScore W2109713013C191897082 @default.
- W2109713013 hasConceptScore W2109713013C192209626 @default.
- W2109713013 hasConceptScore W2109713013C192562407 @default.
- W2109713013 hasConceptScore W2109713013C26517878 @default.
- W2109713013 hasConceptScore W2109713013C38652104 @default.
- W2109713013 hasConceptScore W2109713013C41008148 @default.
- W2109713013 hasConceptScore W2109713013C544778455 @default.
- W2109713013 hasConceptScore W2109713013C61696701 @default.
- W2109713013 hasLocation W21097130131 @default.
- W2109713013 hasOpenAccess W2109713013 @default.
- W2109713013 hasPrimaryLocation W21097130131 @default.
- W2109713013 hasRelatedWork W193387332 @default.
- W2109713013 hasRelatedWork W1965697194 @default.
- W2109713013 hasRelatedWork W1999220259 @default.
- W2109713013 hasRelatedWork W2029414753 @default.
- W2109713013 hasRelatedWork W2071650560 @default.
- W2109713013 hasRelatedWork W2095409671 @default.
- W2109713013 hasRelatedWork W2101610971 @default.
- W2109713013 hasRelatedWork W2107683847 @default.
- W2109713013 hasRelatedWork W2117000619 @default.
- W2109713013 hasRelatedWork W2276354540 @default.
- W2109713013 hasRelatedWork W2406492627 @default.
- W2109713013 hasRelatedWork W2482395229 @default.
- W2109713013 hasRelatedWork W2498093407 @default.
- W2109713013 hasRelatedWork W2545492672 @default.
- W2109713013 hasRelatedWork W2765072161 @default.
- W2109713013 hasRelatedWork W373980101 @default.
- W2109713013 hasRelatedWork W636049924 @default.
- W2109713013 hasRelatedWork W2587568435 @default.
- W2109713013 hasRelatedWork W2925183732 @default.
- W2109713013 hasRelatedWork W3123609039 @default.
- W2109713013 isParatext "false" @default.
- W2109713013 isRetracted "false" @default.
- W2109713013 magId "2109713013" @default.
- W2109713013 workType "article" @default.