FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2109805239> ?p ?o ?g. }

• W2109805239 endingPage "1363" @default.
• W2109805239 startingPage "1355" @default.
• W2109805239 abstract "The semiconductor industry is exploring new metrology techniques capable of meeting the future requirement to characterize three-dimensional structure where the critical dimensions are less than 10 nm. X-ray scattering techniques are one candidate owing to the sub-Å wavelengths which are sensitive to internal changes in electron density. Critical-dimension small-angle X-ray scattering (CDSAXS) has been shown to be capable of determining the average shape of a line grating. Here it is used to study a set of line gratings patterned via a self-aligned multiple patterning process, which resulted in a set of mirrored lines, where the individual line shapes were asymmetric. The spacing between lines was systematically varied by sub-nm shifts. The model used to simulate the scattering was developed in stages of increasing complexity in order to justify the large number of parameters included. Comparisons between the models at different stages of development demonstrate that the measurement can determine differences in line shapes within the superlattice. The shape and spacing between lines within a given set were determined to sub-nm accuracy. This demonstrates the potential for CDSAXS as a high-resolution nanostructure metrology tool." @default.
• W2109805239 created "2016-06-24" @default.
• W2109805239 creator A5040823261 @default.
• W2109805239 creator A5041817773 @default.
• W2109805239 creator A5056086922 @default.
• W2109805239 creator A5069122427 @default.
• W2109805239 date "2015-08-08" @default.
• W2109805239 modified "2023-10-17" @default.
• W2109805239 title "Determining the shape and periodicity of nanostructures using small-angle X-ray scattering" @default.
• W2109805239 cites W1971044461 @default.
• W2109805239 cites W1973289801 @default.
• W2109805239 cites W1973320957 @default.
• W2109805239 cites W1973905275 @default.
• W2109805239 cites W1986389574 @default.
• W2109805239 cites W1990679674 @default.
• W2109805239 cites W1997681334 @default.
• W2109805239 cites W1999215546 @default.
• W2109805239 cites W2001407053 @default.
• W2109805239 cites W2005952519 @default.
• W2109805239 cites W2006815884 @default.
• W2109805239 cites W2008506627 @default.
• W2109805239 cites W2013902252 @default.
• W2109805239 cites W2036529914 @default.
• W2109805239 cites W2038803452 @default.
• W2109805239 cites W2039789272 @default.
• W2109805239 cites W2046307776 @default.
• W2109805239 cites W2049416381 @default.
• W2109805239 cites W2053733550 @default.
• W2109805239 cites W2055072166 @default.
• W2109805239 cites W2056203969 @default.
• W2109805239 cites W2058095599 @default.
• W2109805239 cites W2060124414 @default.
• W2109805239 cites W2060498365 @default.
• W2109805239 cites W2062615547 @default.
• W2109805239 cites W2066122316 @default.
• W2109805239 cites W2068696024 @default.
• W2109805239 cites W2081560549 @default.
• W2109805239 cites W2082712975 @default.
• W2109805239 cites W2091096456 @default.
• W2109805239 cites W2093434112 @default.
• W2109805239 cites W2094227491 @default.
• W2109805239 cites W2098550720 @default.
• W2109805239 cites W2120289562 @default.
• W2109805239 cites W2139360884 @default.
• W2109805239 cites W2152139251 @default.
• W2109805239 cites W2170304105 @default.
• W2109805239 cites W224819109 @default.
• W2109805239 doi "https://doi.org/10.1107/s1600576715013369" @default.
• W2109805239 hasPublicationYear "2015" @default.
• W2109805239 type Work @default.
• W2109805239 sameAs 2109805239 @default.
• W2109805239 citedByCount "51" @default.
• W2109805239 countsByYear W21098052392016 @default.
• W2109805239 countsByYear W21098052392017 @default.
• W2109805239 countsByYear W21098052392018 @default.
• W2109805239 countsByYear W21098052392019 @default.
• W2109805239 countsByYear W21098052392020 @default.
• W2109805239 countsByYear W21098052392021 @default.
• W2109805239 countsByYear W21098052392022 @default.
• W2109805239 countsByYear W21098052392023 @default.
• W2109805239 crossrefType "journal-article" @default.
• W2109805239 hasAuthorship W2109805239A5040823261 @default.
• W2109805239 hasAuthorship W2109805239A5041817773 @default.
• W2109805239 hasAuthorship W2109805239A5056086922 @default.
• W2109805239 hasAuthorship W2109805239A5069122427 @default.
• W2109805239 hasConcept C120665830 @default.
• W2109805239 hasConcept C121332964 @default.
• W2109805239 hasConcept C138268822 @default.
• W2109805239 hasConcept C154945302 @default.
• W2109805239 hasConcept C171250308 @default.
• W2109805239 hasConcept C186187911 @default.
• W2109805239 hasConcept C191486275 @default.
• W2109805239 hasConcept C192562407 @default.
• W2109805239 hasConcept C195766429 @default.
• W2109805239 hasConcept C198352243 @default.
• W2109805239 hasConcept C207789793 @default.
• W2109805239 hasConcept C2524010 @default.
• W2109805239 hasConcept C2777813233 @default.
• W2109805239 hasConcept C30475298 @default.
• W2109805239 hasConcept C33923547 @default.
• W2109805239 hasConcept C41008148 @default.
• W2109805239 hasConceptScore W2109805239C120665830 @default.
• W2109805239 hasConceptScore W2109805239C121332964 @default.
• W2109805239 hasConceptScore W2109805239C138268822 @default.
• W2109805239 hasConceptScore W2109805239C154945302 @default.
• W2109805239 hasConceptScore W2109805239C171250308 @default.
• W2109805239 hasConceptScore W2109805239C186187911 @default.
• W2109805239 hasConceptScore W2109805239C191486275 @default.
• W2109805239 hasConceptScore W2109805239C192562407 @default.
• W2109805239 hasConceptScore W2109805239C195766429 @default.
• W2109805239 hasConceptScore W2109805239C198352243 @default.
• W2109805239 hasConceptScore W2109805239C207789793 @default.
• W2109805239 hasConceptScore W2109805239C2524010 @default.
• W2109805239 hasConceptScore W2109805239C2777813233 @default.
• W2109805239 hasConceptScore W2109805239C30475298 @default.
• W2109805239 hasConceptScore W2109805239C33923547 @default.
• W2109805239 hasConceptScore W2109805239C41008148 @default.
• W2109805239 hasIssue "5" @default.

• next